A special type of iterative learning control (ILC) problem is considered. Due to the insu$cient measurement capability in many real control problems such as Rapid Thermal Processing (RTP), it may happen that only the terminal output tracking error instead of the whole output trajectory tracking error is available. In the RTP chemical vapor deposition (CVD) of wafer fab. industry, the ultimate c...

Temperature measurement and control are two difficult problems in the rapid thermal processing (RTP) system. For many applications such as rapid thermal processing chemical vapor deposition (RTCVD) [1] and rapid thermal oxidation (RTO) [2], large changes in wafer emissivity can occur during film growing, leading to erroneous temperature measurements with a single wavelength pyrometer. The error...

thin films of sno2 nanowires were successfully prepared by using chemical vapor deposition (cvd) process on quartz substrates. afterwards, a thin  layer of palladium (pd) as a catalyst was coated on top of nanowires. for the deposition of pd, a simple and low cost technique of spray pyrolysis was employed, which caused an intensive enhancement on the sensing response of fabricated sensors. prep...

carbon nanotubes were synthesized over a series of zn-containing fe/alumina catalysts by chemical vapor deposition method at two reaction temperatures of 850 and 950 °c using methane as a carbon source. catalysts were synthesized by keeping fe concentration constant and varying zn concentration to study the effects of zn. the catalysts were characterized using x – ray powder diffraction and n2 ...

the growth rate of carbon nanotubes in chemical vapor deposition is simulated by using a theoretical analysis of the phonon vibration of the system. simulations demonstrate that the growth rate of carbon nanotubes with larger diameters is smaller because of higher damping factors and carbon nanotube inertia. an optimum temperature for the growth rate is calculated for a carbon nanotube on fe ca...

in this study, we describe the growth of carbon nanotubes on commercial iron nanoparticles without carbon shell (fe (nm), size 2o3 and fe* (nm)/mgo) was carried out by mixing commercial fe* nanoparticles (as catalyst) with al2o3 and mgo powders (as supports)by using ball-milling method. the results show in spite of the fact that ball-milling process can have negative effects on diameter and mor...

chemical vapor deposition was employed to synthesize carbon nanotubes with ni-loaded mcm-41 and mcm-48 as catalysts and acetylene as precursor at 750°c. mesoporous ni mcm-41 and ni mcm-48 molecular sieves were synthesized by a hydrothermal method and were characterized by xrd and n2 adsorption isotherm. the catalytically synthesized carbon materials were characterized with raman spectroscopy, n...

Ceramic Thermal Barrier Coatings (TBCs) on superalloy components are being used successfully in land-based gas turbine and aircraft engines. These coatings are generally made by either air plasma spraying (APS) or electron beam physical vapour deposition (EB-PVD). In general, EB-PVD TBCs have superior durability due to the columnar structure, but they are very expensive compared to APS TBCs. EB...

the current study reports some interesting growth of novel in2o3 nanostructures using ambient-controlled chemical vapor deposition technique in the presence of a strongly reducing hydrazine ambient. the experiments are systematically carried out by keeping either of the carrier gas flow rate or the source temperature constant, and varying the other. for each of the depositions, the growth is st...