High-resolution transmission electron microscopy (TEM) imaging and energy-dispersive X-ray spectroscopy (EDS) chemical mapping have been used to examine key processing steps that enable sub-20-nm lithographic patterning of the material Hf(OH)4-2x-2y(O2)x(SO4)y·qH2O (HafSOx). Results reveal that blanket films are smooth and chemically homogeneous. Upon exposure with an electron beam, the films b...

The optimization of etchant parameters in wet etching plays an important role in the fabrication of semiconductor devices. Wet etching of tetramethylammonium hydroxide (TMAH)/isopropyl alcohol (IPA) on silicon nanowires fabricated by AFM lithography is studied herein. TMAH (25 wt %) with different IPA concentrations (0, 10, 20, and 30 vol %) and etching time durations (30, 40, and 50 s) were in...

Pyrograms of Ihree fulvic acids (FAs) or ditferenl origins and Ihe corresponding pyrosrams obtaincd by reactive pyrolysis wilh Iclramclhylammonium hydroxide (TMAH) are compared. Thi! proc.cdure inlroduces bolh slriking qualilalive and quanlilalive changes in lhe pyrolylic pallems of Ihe FAs. which are discussed in lerms of Ihe usefulness of Ihis approach lo slructural sludies. Sorne non·pyrolys...

The aquatic ecotoxicity of chemicals involved in the manufacturing process of thin film transistor liquid crystal displays was assessed with a battery of four selected acute toxicity bioassays. We focused on tetramethylammonium hydroxide (TMAH, CAS No. 75-59-2), a widely utilized etchant. The toxicity of TMAH was low when tested in the 72 h-algal growth inhibition test (Pseudokirchneriellia sub...

The thermochemolytic behavior of 4-O-etherified cinnamyl alcohols and aldehydes in lignin was investigated in the presence of tetramethylammonium hydroxide (TMAH) (315 degrees C/4 s), using veratrylglycol-beta-(coniferyl alcohol) ether (1a), veratrylglycol-beta-(sinapyl alcohol) ether (1b), and veratrylglycol-beta-(coniferyl aldehyde) ether (2). The methylated products were monitored with gas c...

The paper presents the design and simulation of double spiral Pt-based microhotplate (MHP) for gas sensing application. A platinum resistor of 52 Ω has been designed and simulated on a 0.3 micron thick SiO2 suspended membrane of size 40 × 40 μm using ANSYS. The SiO2 membrane of size 40 × 40 μm and thickness 0.3 micron has been fabricated successfully by bulk micromachining in <100> orientation ...

Three different milled lignins isolated from bamboo, pine and beech, corresponding to the three different structural groups, have been subjected to pyrolysis in the presence of tetramethylammonium hydroxide (TMAH) and tetrabutylammonium hydroxide (TBAH). Pyrolysis of the lignins in the presence of TMAH releases the methyl esters and methyl ethers of the different lignin monomers. Several moieti...

A simple and rapid ultrasound assisted extraction (UAE) protocol with dilute solutions of tetramethylammonium hydroxide (TMAH) for the speciation of mercury in fish and plant tissues was developed as an alternative to conventional methods which require intensive treatments. The main operational parameters, such as extractant concentration (TMAH), sonication time and amount of sample, were optim...

This paper presents the results from an assessment of the application of a new molecular analytical procedure, CTMAH thermochemolysis, to study the chemical modi®cation of lignin by white-rot and brown-rot fungi. This technique di€ers from other molecular chemolysis procedures (e.g. TMAH thermochemolysis and CuO alkaline oxidation) as it enables one to determine the amount of hydroxylated aroma...