The majority of microelectromechanical system (MEMS) devices must be combined with integrated circuits (ICs) for operation in larger electronic systems. While MEMS transducers sense or control physical, optical or chemical quantities, ICs typically provide functionalities related to the signals of these transducers, such as analog-to-digital conversion, amplification, filtering and information ...

Process planning for a MEMS device is almost always conducted manually by the designer to date. As the structures of MEMS devices become more and more complicated, in order to release the designers from the hard and tedious work and speed up the development of MEMS products, such a situation should be changed. In this study, a solid based CAPP method for surface micromachined MEMS device is pre...

A new approach to wideband and smart re-configurable antennas using RF MEMS switches and fractal antennas is presented. Index Terms – Smart antennas, wideband, fractals, RF-MEMS.

We report a MEMS (Micro-Electro-Mechanical Systems)-based microbial fuel cell (MFC) that produces a high power density. The MFC features 4.5-μL anode/cathode chambers defined by 20-μm-thick photo-definable polydimethylsiloxane (PDMS) films. The MFC uses a Geobacter-enriched mixed bacterial culture, anode-respiring bacteria (ARB) that produces a conductive biofilm matrix. The MEMS MFC generated ...

We are developing physical design tools for surfacemicromachined MEMS, such as polysilicon microstructures built using MCNC’s Multi-User MEMS Process service. Our initial efforts include automation of layout synthesis and behavioral simulation from a MEMS schematic representation. As an example, layout synthesis of a folded-flexure electrostatic combdrive microresonator is demonstrated. Lumpedp...

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified...

in this paper, a robust pid control scheme is proposed for micro-electro-mechanical-systems(mems) optical switches. the proposed approach is designed in a way which solves twochallenging and important problems. the first one is successful reference tracking and the second ismitigating the system nonlinearities. the overall system composed of nonlinear mems dynamicsand the pid controller is prov...

2010 WILEY-VCH Verlag Gmb Standard photolithography-based methods for fabricating microelectromechanical systems (MEMS) present several drawbacks including incompatibility with flexible substrates and limitations to wafer-sized device arrays. In addition, it is difficult to translate the favorable economic scaling seen in the capital equipment-intensive microelectronics industry to the manufact...

Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and, thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This...