There are several application areas where the simultaneous measurement of rates of rotation about three mutually orthogonal axes is required. In this paper the principle features of a 3-axis vibrating ring gyroscope are described. The fabrication process for the gyroscope is presented and employs standard MEMS techniques. The modal properties for the ring are measured experimentally using laser...

Activity monitoring of living creatures based on the structural vibration ambient objects is a promising method. For measurement, multi-axial inertial measurement units (IMUs) offer high sampling rate and small size compared to geophones, but have higher intrinsic noise. This work proposes sensing device that combines single six-axis IMU with beam structure enable vibrations. The integrated int...

This work presents the micro-mirror switch array for use on free-space optical interconnect platform which integrated with a digital 1×8 de-multiplexer on-chip control circuit together. The device employs electrostatic actuation for light beam directions control. The diameter of each mirror is about 50 μm and the overall chip size is around 1.8 by 1.8 mm. The professional simulation software wa...

Because the sizes of samples differ in x-ray micro-CT applications, it is desirable to have a mechanism to change the field of view of a micro-CT scanner. A well-known way to double the diameter of the field of view is to displace a detector array by 50%. In this paper, we propose to displace a detector array by an amount of greater than 0% but less than 50% for a continuously adjustable field ...

A piezoelectric bimorph beam, as an upgraded cantilever beam structure, can be used to detect gas content and build a micro-actuator, among other functions. Thus, this beam is widely applied to microelectromechanical systems (MEMS), transformers, and precision machinery. For example, when photoacoustic spectroscopy is performed to detect oil-soluble gas in transformers, a micro-cantilever beam ...

In the paper, the enhanced measurements of the laser micro-jet processing are discussed. In fact, within pure water breakdown threshold of laser, the less focal which focused with the appropriate focusing lens and the small nozzle of water chamber enhance the laser power density ,at the same time, the laser beam transport in the wave guided water with the proper total reflection angle. The las...

Surface micro-structuring of silica glass plates was performed by using laser-induced backside wet etching (LIBWE) upon irradiation with a single-mode laser beam from a diode-pumped solidstate UV laser at 266 nm. We have succeeded in a well-defined micro-pattern formation without debris and microcrack formations around the etched area on the basis of galvanometer-based point scanning system wit...

This paper investigates damping ratio in micro-beam resonators based on magneto-thermo-elasticity. A unique aspect of the present study is the effect of permanent magnetic field on the stiffness and thermo-elastic damping of the micro resonators. In our modeling the theory of thermo-elasticity with interacting of an externally applied permanent magnetic field is taken into account. Combined the...

A hybrid micro-macro-optical shuffle interconnection approach is described. The new concept minimizes distortion in multichip smart-pixel shuffle interconnection systems that use macro-optics to link dense arrays of vertical-cavity surface-emitting laser (VCSEL) sources and matching arrays of detectors. The typical narrow-beam cones of VCSEL's are exploited by use of beam-deflecting micro-optic...

Micromachined gyroscopes for measuring rate or angle of rotation have attracted a lot of attention during the past few years for several applications. They are widely used to detect orientation in space, including automotive applications for ride stabilization and rollover detection; some consumer electronic applications, such as video-camera stabilization, virtual reality, and inertial mouse f...