In this paper, we experimentally demonstrate non-degenerate parametric resonance in a torsional micro electro mechanical (MEM) oscillator with two interacting mechanical modes of oscillation. The parametric oscillation results from a displacement-dependent electrostatic force generated in both the modes of oscillation. There is a decoupling of the input and the output frequencies in this mode o...

According to FCNT probe manufacture technology, it adopts Micro Electronic Mechanical system (MEMS) [1] (refer to Figure 1) and electrophoresis technology [2] [3] (refer to Figure 2) to let CNT attach to the front edge of cantilever beam and in the front of the tip (refer to Figure 3). In doing this, we can use the FCNT to approach the sample quickly and reduce the testing time because the func...

This paper reports a new packaging method for a wide range of MEMS for application on both the wafer and device scale. Titanium is used as the packaging material in this work and both silicon and titanium MEMS devices are integrated on to a titanium substrate. A Nd:YAG pulsed laser is used to micro-weld the titanium cap to the substrate. A three-dimensional time dependent model of heat flow dur...

Current numerical methods have slow dynamic visualisation capability, which is usually separate from the calculation phase. This paper investigates whether an analogue virtual reality (VR) model of a structure can integrate calculation and visual representation. The paper shows how the user can interact with a VR analogue model of a cantilever beam, move a concentrated load along the length of ...

Vibration suppression of smart beams using the piezoelectric patch structure is presented in the present work. The smart system consists of a beam as the host structure and piezoceramic patches as the actuation and sensing elements. An experimental set-up has been developed to obtain the active vibration suppression of smart beam. The set-up consists of a smart cantilever beam, the data acquisi...

Collocation methods are popular in providing numerical approximations to complicated governing equations owing to their simplicity in implementation. However, point collocation methods have limitations regarding accuracy and have been modified upon with the application of B-spline approximations. The present study reports the stress and deformation behavior of shear deformable functionally grad...

Active Q control may be used to modify the effective quality (Q) factor of an atomic force microscope (AFM) micro-cantilever when operating in tapping mode. The control system uses velocity feedback to obtain an effective cantilever Q factor to achieve optimal scan speed and image resolution for the imaging environment and sample type. Time delay of the cantilever displacement signal is the mos...

We present quantitative and qualitative detection of analyte vapors using a microfabricated silicon cantilever array. To observe transduction of physical and chemical processes into nanomechanical motion of the cantilever, swelling of a polymer layer on the cantilever is monitored during exposure to the analyte. This motion is tracked by a beam-deflection technique using a time multiplexing sch...