Marine acoustic sensors can detect underwater information. The cilium micro-electro-mechanical system (MEMS) vector hydrophone (CVH) is the core component of ocean noise measurement system. performance CVH, especially its self-noise, has received widespread attention. In this paper, we propose a solution to improve CVH using an array environmental in complex deep-water environment. We analyzed ...

Fabrication of Micro-Electro-Mechanical-Systems (MEMS) requires deposition of films such as SiO2, Si3N4, ZnO, polysilicon, phosphosilicate glass (PSG), Al, Cr-Au, Pt, etc. for use as structural, sacrificial, piezoelectric and conducting material. Deposition of these materials at low temperature is desirable for fabricating sensors/actuators on temperature-sensitive substrates and also for integ...

This paper proposes an adaptive observer-based scheme to control fractional-order chaotic micro-electro-mechanical-systems (MEMS). The model of a system exhibits the dynamic behaviour physical more accurately than similar integer-order one. An considering unknown parameters is presented for micro-electro-mechanical-system. To handle existence parameters, law consists both estimated and also sta...

Silicon pressure sensors based on micro-electro-mechanical-systems (MEMS) technologies are gaining popularity for applications in bio-medical devices. In this study, a silicon piezo-resistive pressure sensor die is used in a feasibility study of developing a manometric catheter for functional swallowing disorders diagnosis. The function of a manometric catheter is to measure the peak and intrab...

This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where mechanical to causes it produce voltage, this voltage is used actuate Micro-Electro-Mechanical-system (MEMS) switch. For first time, we present fabrication process Triboelectric-Nano-Generator (TENG) with technology. The MEMS-TENG has suspended 1.5 mm × pl...

This paper presents field tests of challenging flight applications obtained with a new family of lightweight low-power INS/GNSS (inertial navigation system/global satellite navigation system) solutions based on MEMS (micro-electro-mechanical- sensor) machined sensors, being used for UAV (unmanned aerial vehicle) navigation and control as well as for aircraft motion dynamics analysis and traject...

Small satellite missions are characterized by tight constraints on cost, mass, power, and volume that generally make them unable to fly inertial measurement units (IMUs) required for orbital missions demanding precise orientation and positioning. Instead, small satellite missions typically fly low-cost micro-electro-mechanical system (MEMS) IMUs. The performance characteristics of MEMS IMUs mak...

This paper proposes the electronic heart sound sensor, based on the piezoresistive principle and MEMS (Micro-Electro-Mechanical System) technology. Firstly, according to the characteristics of heart sound detection, the double-beam-block microstructure has been proposed, and the theoretical analysis and finite element method (FEM) simulation have been carried out. Combined with the natural freq...