When the dimensions of polycrystalline structures become comparable to the average grain size, some reliability issues can be reported for the moving parts of inertial microelectromechanical systems (MEMS). Not only the overall behavior of the device turns out to be affected by a large scattering, but also the sensitivity to imperfections gets enhanced. In this work, through on-chip tests, we e...

Integrated chemical and biological sensors give advantages in cost, size and weight reduction and open new prospects for parallel monitoring and analysis. Biosensors based on nanoelectromechanical systems (NEMS) are the most attractive candidates for the integrated platform. However, actuation and transduction techniques (e.g. electrostatic, magnetomotive, thermal or piezoelectric) limit their ...

Controlled actuation of electroactive polymers with embedded high dielectric nanoparticles is theoretically analyzed. If the inclusions are placed randomly in the elastomer body, the composite always contracts along the direction of the applied field. For a simple cubic distribution of inclusions, contraction occurs if the applied field is directed along the [001] direction of the lattice. For ...

The problem of numerical analysis one electrostatic nanoelectromechanical system is considered in the article. Nanoelectromechanical systems are miniature devices that combine electronic and mechanical components micro nano sizes. Electrostatic actuation such most common types used accelerometers, switches, micro-mirrors, micro-resonators, etc. disadvantages related to pull-in instability. This...

Actuation devices are used for many space applications and there is increasing need to reduce their size, mass, cost and power consumption. To address this need, JPL is developing electroactive polymers (EAP) with emphasis on two EAP categories that induce large bending and longitudinal actuation strains. Comparison between EAP and the widely used transducing actuators shows that, while lagging...

Elec:troactive thin-film polymers a.re increa.sinp;ly beinp; used as sensors and actuators in aerospace structures [1,2]. They also have sip;nificant potential for applications in musc:le mechanisms and micro-electro-mechanical systems (MEMS). In these applications, polymer films of thickness varyinp; between 20 and :100 tLin are utilized. Actuation of these polymers is attributed to piezoelect...

This paper provides an overview of high-aspect-ratio CMOS micromachining, focusing on materials characterization, reliability, and fault analysis. Composite microstructural beam widths and gaps down to 1 .2 tm are etched out of conventional CMOS dielectric, aluminum, and gate-polysilicon thin films using post-CMOS dry etching for both structural sidewall definition and for release from the subs...

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral mode...

This paper presents a low-power hybrid thermopneumatic microvalve with an electrostatic hold and integrated valve plate position sensing. This combination of actuators in a single structure enables a high throw and force actuator with low energy consumption, a combination that is difficult to otherwise achieve. The completed 7.5 mm × 10.3 mm × 1.5 mm valve has an open flow rate of 8 sccm at 600...

We present the design, fabrication, and testing of a microelectromechanical systems (MEMS) light modulator based on pixels patterned with periodic nanohole arrays. Flexure-suspended silicon pixels are patterned with a two dimensional array of 150 nm diameter nanoholes using nanoimprint lithography. A top glass plate assembled above the pixel array is used to provide a counter electrode for elec...