Articles you may be interested in Influence of shield roughness on Mo/Si defect density for extreme ultraviolet lithography mask blanks The effects of oxygen plasma on the chemical composition and morphology of the Ru capping layer of the extreme ultraviolet mask blanks Characterization of ruthenium thin films as capping layer for extreme ultraviolet lithography mask blanks Growth and printabil...

Localized surface plasmon resonance (LSPR) is the coherent oscillation of conductive electrons confined in noble metallic nanoparticles excited by electromagnetic radiation, and nanosphere lithography (NSL) is one of the cost-effective methods to fabricate metal nanostructures for LSPR. NSL can be categorized into two major groups: dispersed NSL and closely pack NSL. In recent years, gold nanoc...

Nano-compact disks ~Nano-CDs! with 400 Gbit/in topographical bit density ~nearly three orders of magnitude higher than commercial CDs! have been fabricated using nanoimprint lithography. The reading and wearing of such Nano-CDs have been studied using scanning proximal probe methods. Using a tapping mode, a Nano-CD was read 1000 times without any detectable degradation of the disk or the silico...

In this paper we summarize some recent results on mean residual lifetime (MRL) and the mean past lifetime (MPL) of a k-out-of-n structure at the system level. In section 2, it is assumed that in a k-out-of-n system all the components of the system are working at time t. Under this condition, the MRL of the system is de…ned and several properties of that are derived. In section 3, under the assu...

Monadic second-order logic (MSOL) provides a general framework for expressing properties of reactive systems as modelled by trees. Monadic path logic (MPL) is obtained by restricting second-order quantification to paths reflecting computation sequences. In this paper we show that the expressive power of MPL over trees coincides with the usual branching time logic CTL∗ embellished with a simple ...

Submarine nanorobots are being developed for use in branchy therapy, spinal surgery, cancer therapy, etc. Nanoparticles have been developed for use in drug delivery systems and for cure in eye disorders and for use in early diagnosis. Research in nanomedicine is under way in development of diagnostics for rapid monitoring, targeted cancer therapies, localized drug delivery, and improved cell ma...

This paper discusses the basic concepts and current state of development of EUV lithography (EUVL), a relatively new form of lithography that uses extreme ultraviolet (EUV) radiation with a wavelength in the range of 10 to 14 nanometer (nm) to carry out projection imaging. Currently, and for the last several decades, optical projection lithography has been the lithographic technique used in the...

We presented a soft lithography technique of fabricating polymer photonic crystal superprism structures using elastomeric polydimethylsiloxane templates. Dense two-dimensional photonic crystal superprism structures with feature sizes of 150–500 nm and aspect ratios of up to 1.25 were replicated. Large field size and easy fabrication are two major advantages when compared with other imprint tech...