Programmable matter is a digital material having computation, sensing, and actuation capabilities as continuous properties active over its whole extent. To make programmable matter economical to fabricate, we want to use electromagnetic direct drive, rather than clockwork, to actuate the particles. Previous attempts to fabricate small scale (below one centimeter) robotic systems with electromag...

The problem of numerical analysis one electrostatic nanoelectromechanical system is considered in the article. Nanoelectromechanical systems are miniature devices that combine electronic and mechanical components micro nano sizes. Electrostatic actuation such most common types used accelerometers, switches, micro-mirrors, micro-resonators, etc. disadvantages related to pull-in instability. This...

The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The effect of section change on the mechanical properties is studied analytically and veri...

We describe a novel secondary-electron ion microscope (SEIM), designed for diagnostics of the upcoming submicron Columbia University charged-particle microbeam. This secondary-electron ion microscope allows much higher resolutions, at higher single particle detection efficiencies, than previously available, for rapid and accurate diagnostics of sub-micron charged-particle beams. Based on ion el...

The mechanism of the inchworm motor, which overcomes intrinsic displacement and force limitations MEMS electrostatic actuators, has undergone constant development in past few decades. In this work, actuation unit cell (AUC) that is designed to cooperate with many other counterparts a novel concept modular-like cooperative actuator system examined. First, briefly discussed. A simplified analytic...

Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and, thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This...

Micropumps have promising applications in biomedical devices andmicro total analysis systems. Conjugated polymer actuators provide an important potential mechanism for realizing micropumps because of their amenability to miniaturization and low actuation voltages. In this paper we present a novel, conjugated polymer petal-actuated diaphragm micropump, which is in contrast to the typical diaphra...