The design and implementation of a monolithic micro electro mechanical systems (MEMS)-based gas sensor virtual component is described. The gas sensor virtual component encloses the sensor and its associated analog circuitry into a digital shell so that all interface connections to the virtual component are digital. The system architecture supports an array of gas sensor elements. System respons...

This paper describes the design, fabrication and initial characterisation of a MEMS-based environmental monitoring system. Intended for use with miniaturised Wireless Sensor Network (WSN) motes, the die measures 3 x 3mm and incorporates humidity, temperature, corrosion, gas and gas flow velocity sensors on a single substrate. Fabricated using a combination of surface and bulk micromachining tec...

We present modeling, design, fabrication and characterization of a new type of all-optical frequency modulated MEMS force sensor based on a mechanically amplified double clamped waveguide beam structure with integrated Bragg grating. The sensor is ideally suited for force measurements in harsh environments and for remote and distributed sensing and has a measured sensitivity of -14 nm/N, which ...

The Smart Surface1project aims at designing an integrated micro-manipulator based on an array of micromodules connected with a 2D array topology network. Each micromodule comprises a sensor, an actuator and a processing unit. One of the aims of the processing unit is to differentiate the shape of the part that is put on top of the Smart Surface. From a set of shapes this differentiation is done...

This work presents a unique thermal infrared (IR) camera calibration technique using wireless “smart” micro electro-mechanical (MEMS) sensors. The word “smart” denotes capabilities of MEMS other than sensing, such as, computing and communication. We foresee the use of widely distributed and deeply embedded “smart” MEMS sensors as potential calibration gauges for spectral cameras, such as, therm...

The calibration path of system-level directly affects the incentive effect error term and thus accuracy. Currently, planning paths is predominantly designed based on personal experience, resulting in insufficient for terms, low accuracy, long times. Therefore, this study proposes a optimal method an improved Dijkstra’s algorithm. First, problem was modeled as multi-fork regular root tree model,...

A microelectromechanical systems (MEMS) temperature sensor based on a cascade three-stage “bent-beam” structure is described in this paper. A suspended structure mechanically deforms in response to the change in ambient temperature, and then, a displacement is obtained; the structure is composed of three cascaded systems in order to enhance sensor sensitivity. The final conversion is made to an...

Generally, underwater unmanned vehicle (UUV) have adopted an inertial navigation system (INS), dead reckoning (DR), acoustic navigation and geophysical navigation techniques as the navigation method because GPS does not work in deep underwater environment. Although the tactical inertial sensor has been usually used at UUV for precise control during long operation time because the sensor can pro...

The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...