In this work the design, fabrication and testing of the first 3D-printed and wet metallized capacitive z-axis accelerometer with a volume of 3.4 cm × 8 mm × 2.5 mm is presented. Preliminary results well match the modelling, both in terms of electromechanical parameters and of measured sensitivity, thus validating the proposed concept and fabrication process. With a spring thickness of 300 μm an...

Energy harvesting is attractive for powering wireless sensors, especially in applications such as body sensor networks and pervasive sensing, where power source replacement or recharging is impractical. A MEMS (micro-electro-mechanical systems) electrostatic harvesting device suitable for body motion has been reported previously, using a rolling rod as the proof mass. A new rolling rod device i...

This paper reports material selection methodology for radio frequency — micro electro mechanical systems (RF-MEMS) switches used for reconfigurable antennas. As there are variety of materials available to design engineer, a proper technique to select the best possible material is needed. Three primary performance indices, pull-in voltage, RF-loss, and thermal residual stress, are used to obtain...

In this paper a four-mirror tunable micro electro-mechanical systems (MEMS)Fabry Perot Interferometer (FPI) concept is proposed with the mathematical model. Thespectral range of the proposed FPI lies in the infrared spectrum ranging from 2400 to 4018(nm). FPI can be finely tuned by deflecting the two middle mirrors (or by changing the threecavity lengths). Two different cases were separately co...

MEMS (Micro Electro Mechanical System) design systems are used for the development of microneedles, which are used for drug delivery. The drug delivery through micronnedle is painless which is not in case of transdermal needles. In this paper the simulation and analysis of microneedle is presented. The typical structure of a microneedle is simulated for studies of the structural behavior of mic...

We introduce the first implantable drug delivery system based on MEMS (Micro-Electro-Mechanical-Systems) technology specifically designed as a platform for treatment in ambulatory emergency care. The device is named IRD(3) (implantable rapid drug delivery device) and allows rapid delivery of drugs. Vasopressin was used as a model drug for in vitro tests as it is a commonly used drug for cardiac...

Wireless Sensor Networks (WSNs) are arising from the proliferation of Micro-Electro-Mechanical Systems (MEMS) technology as an important new area in wireless technology. They are composed of tiny devices which monitor physical or environmental conditions such as temperature, pressure, motion or pollutants, etc. Moreover, the accuracy of individual sensor node readings is decisive in WSN applica...

A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent po...

This report presents an approach to automation of a protein crystallography task called streak seeding. The approach is based on novel and unique custom-designed silicon microtools, which we experimentally verified to produce results similar to the results from traditionally used boar bristles. The advantage to using silicon is that it allows the employment of state-of-the-art micro-electro-mec...

A fixed microelectrode device for cell stimulation has been designed and fabricated using micro-electro-mechanical systems (MEMS) technology. Dielectrophoretic forces obtained from non-uniform electric fields were used for manipulating and positioning osteoblasts. The experiments show that the osteoblasts experience positive dielectrophoresis (p-DEP) when suspended in iso-osmotic culture medium...