Micro capillary networks widely exist in nature in forms of mass transport pathways, such as blood vessels. However their complicated geometry and the extra fine small features bring a great challenge to their potential applications in term of fabrication. To overcome the fabrication challenge, we presented in this thesis a novel method to fabricate fully three dimensional (3D) microstructures ...

The meso/micro layered manufacturing technologies have significant implications for the design and fabrication of complex miniature structures. A laser-based additive/subtractive Rapid Manufacturing system is thus developed to build meso/micro structures. By incorporating laser microdeposition and micromachining with a pulsed Nd:YAG laser that has four harmonic wavelengths, this manufacturing s...

The Micro pump is an essential component in a Micro Total Analysis System (μTAS). A feasible and reliable design of the micro pump is a key for the development of the μTAS. The Valve-less Rectification Micro Pump (VRMP) has many advantages, such as: non-moving parts, independent of fluids and channels properties, reliable, and easy to fabricate. Fluid diodicity is an essential parameter of the ...

Boron as thin film material is of relevance for use in modern micro- and nano-fabrication technology. In this research boron films are realized by a number physical chemical deposition methods, including magnetron sputtering, electron-beam evaporation, plasma enhanced vapor (CVD), thermal/non-plasma CVD, remote CVD atmospheric pressure CVD. Various physical, mechanical characteristics these inv...

Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design methodology that enables designers to create fabrication-ready 3D models of MEMS devices without concerning the mask layout. Compared with present geometric ...

The electrospinning technique is widely used for the fabrication of micro- and nanofibrous structures. Recent studies have focused on the use of less toxic and harmful solvents (benign solvents) for electrospinning, even if those solvents usually require an accurate and longer process of optimization. The aim of the present work is to demonstrate the versatility of the use of benign solvents, l...