Thin-film diamond has many potential applications in electronics and optoelectronics, microelectromechanical systems (MEMS), wear-resistant coatings, thermal management, and other areas owing to its exceptional electronic, optical, mechanical, chemical/tribological, and thermal properties, respectively. However, challenges in the integration of thin-film diamond with other materials continue to...

In this paper, a microelectromechanical system (MEMS) cantilever sensor was designed, modeled and fabricated to measure the terahertz (THz) radiation induced photoacoustic (PA) response of gases under low vacuum conditions. This work vastly improves cantilever sensitivity over previous efforts, by reducing internal beam stresses, minimizing out of plane beam curvature and optimizing beam dampin...

Emerging opportunities are placing greater demands on device fabrication: next-generation microelectronics will need minimum features of less than 100 nm, high-throughput drug screening will require facile methods to incorporate sensitive biological components into microelectromechanical systems (MEMS), and implantable devices will need to be built from biocompatible materials. Increasingly, th...

We demonstrate a memory device based on the nonlinear dynamics of an in-plane microelectromechanical systems (MEMS) clamped–clamped beam resonator, which is deliberately fabricated as a shallow arch. The arch beam is made of silicon, and is electrostatically actuated. The concept relies on the inherent quadratic nonlinearity originating from the arch curvature, which results in a softening beha...

Suspended microchannel resonators SMRs are an innovative approach to fluid-based microelectromechanical mass sensing that circumvents complete immersion of the sensor. By embedding the fluidics within the device itself, vacuum-based operation of the resonator becomes possible. This enables frequency shift-based mass detection with high quality factors, and hence sensitivity comparable to vacuum...

Digital design tools such as logic synthesis, semicustom layout and behavioral simulation have drastically changed the digital IC design process, enabling design of complex “systems on a chip”. The usefulness of such chips are limited in a world dominated by information that is not represented by 0s and 1s. Overcoming these limitations has led to mixed-signal, and mixed-domain technologies. We ...

Ultrahigh resolution two and three-dimensional optical coherence tomography (OCT) imaging was performed using a miniaturized, two-axis scanning catheter based upon microelectromechanical systems (MEMS) mirror technology. The catheter incorporated a custom-designed and fabricated, 1-mm diameter MEMS mirror driven by angular vertical comb (AVC) actuators on both an inner mirror axis and an outer,...

This paper reports on a visual servoing system capable of 2DOF nanopositioning using a novel multi-axis electrostatic MEMS (MicroElectroMechanical System) device. The high aspect ratio micromanipulator was fabricated using a high yield process with Deep Reactive Ion Etching (DRIE) on Silicon-On-Insulator (SOI) wafers, which produces larger electrostatic forces and requires lower actuation volta...