In situ metrology overcomes many of the limitations of existing metrology techniques and is capable of exceeding the performance of present-day optics. A novel technique for precisely characterizing an X-ray bimorph mirror and deducing its two-dimensional (2D) slope error map is presented. This technique has also been used to perform fast optimization of a bimorph mirror using the derived 2D pi...

As parametric variation increases in importance with shrinking dimensions and increasing integration, the need to understand and manage such variation is becoming critical. Statistical metrology is a collection of tools and techniques for the systematic characterization and study of variation in semiconductor manufacturing. In addition to methods for collecting large volumes of data, important ...

Quantum-dense metrology constitutes a special case of quantum metrology in which two orthogonal phase space projections of a signal are simultaneously sensed beyond the shot-noise limit. Previously, it was shown that the additional sensing channel that is provided by quantum-dense metrology contains information that can be used to identify and to discard corrupted segments from the measurement ...

Dynamic metrology holds the key to overcoming several challenging limitations of conventional optical metrology, especially with regards to precision freeform optical elements. We present two dynamic metrology systems: 1) adaptive interferometric null testing; and 2) instantaneous phase shifting deflectometry, along with an overview of a gradient data processing and surface reconstruction techn...

Our journal ‘Metrology’ has been up and running for a few years now, with interesting ground-breaking publications covering the wide field that concept of ‘metrology’ encompasses [...]

The idea of remote laboratories is reviewed, and the potential of the approach on selected examples with special focus on the field of optical metrology is illustrated. The concept of remote metrology is extended beyond the simple exchange of data between distant laboratories and the remote access to experimental facilities embedded in modern educational concepts. We describe an architecture th...

1 Gdansk University of Technology, Faculty of Electronics, Telecommunications and Informatics, Department of Metrology and Optoelectronics, ul. G. Narutowicza 11/12, 80-233 Gdansk, Poland, phone 48 58 347-14-87, fax 48 58 347-13-57, e-mail [email protected] 2 Gdansk University of Technology, Faculty of Electronics, Telecommunications and Informatics, Department of Metrology and Optoelectronics,...

This paper provides a very brief overview of the capabilities and recent accomplishments of many of the low frequency electrical metrology projects at the National Institute of Standards and Technology. The projects presented here include the 5 main electrical measurement services projects (dc voltage, resistance, impedance, ac-dc difference, and electric power) and some electrical metrology re...

For optical metrology by transverse translation diversity phase retrieval (or ptychography), information theoretic limits on the ability to estimate subaperture translation, essential for accurate metrology, are assessed as a function of the optical aberrations of the system being measured. Special attention is given to the case that an unknown linear phase aberration, or equivalent detector or...