Optical nano-cavities are ideal platforms for label-free sensing. In this work, we demonstrated sensing of glucose concentrations at 10mg/dL with photonic crystal nanobeam sensor. The sensor exhibits high sensitivity and linearity covering the whole range of clinically relevant levels. Current device was fabricated in silicon-on-insulator platform and operated at telecom wavelength, and thus fu...

The development of low temperature, thin film transistor processes that has enabled flexible displays also presents opportunities for flexible electronics and flexible integrated systems. Of particular interest are possible applications in flexible, low metal content, sensor systems for unattended ground sensors, smart medical bandages, electronic ID tags for geo-location, conformal antennas, n...

A technique for nondestructive detection of small cracks in polycrystalline silicon substrates used for solar cells was demonstrated. A millimeter wave signal of 110 GHz was used and the amplitude of the reflection coefficient was measured. To increase the testing speed, a slit aperture sensor was used. The crack was detected effectively, while the testing speed was 50×35 mm/s. The experimental...

In this work, we theoretically and experimentally demonstrate a highly sensitive porous silicon membrane waveguide biosensor in the Kretschmann configuration, and show how the cladding material directly impacts the waveguide sensor detection sensitivity and resonance width. Dielectric and metal-clad porous waveguides in the Kretchmann configuration have the potential to achieve significantly en...

In this paper, a bulk micromachined silicon load cell is presented, designed for loads up to 1000 kg. ANSYS simulations were used to determine the load cell dimensions and strain gauge positions. The load cell consists of two parts, which are bonded to each other using Low Temperature Silicon Direct Bonding processes (LTSDB). To isolate the membrane with the sensors from lateral displacements w...

We show that a microfabricated field-effect sensor located at the terminus of a freestanding cantilever can detect surface potential changes resulting from the adsorption of charged molecules in an aqueous environment. The charge sensitive region, defined by lightly doped silicon, is embedded within the heavily doped silicon cantilever. Since both the electrical trace and sensitive region are p...

We investigate a highly sensitive optical sensor based on two cascaded microring resonators exploiting the Vernier effect. The architecture consists of two microrings with a slight difference in their free spectral ranges. This allows the generation of the Vernier effect for achieving ultra-high sensitivities. The sensor chip was fabricated using a silicon nitride platform and characterized wit...

Zinc oxide and Ga-doped ZnO nanowires and nanorods are synthesized on various substrate like Fluorine doped tin oxide glass plate, SiO2 coated Silicon substrate and aluminum nitride coated silicon substrates. The coating process carried out using zinc oxide sol-gel solution. The synthesized material was characterized using XRD (X-ray diffraction), FE-SEM (Field emission scanning electron micros...

Ž . A capacitive sensor has been developed for measuring the vertical deflection of bridge-type micro-electromechanical MEMS silicon actuators. The sensor requires no electrodes above the actuator surface and does not require the actuator diaphragm to be used as a signal electrode. Sets of interdigitated electrodes, one for ac signal injection and the other for signal sensing, are placed beneat...

Traditional silicon waveguides are defined by waveguide trenches on either side of the high-index silicon core that leads to fluid leakage orifices for over-layed microfluidic channels. Closing the orifices needs additional fabrication steps which may include oxide deposition and planarization. We experimentally demonstrated a new type of microfluidic channel design with ultralow-loss waveguide...