− A new method of three-dimensional profile measurement of four-step reference specimens is presented. Instead of measuring only the height difference between central points of the two neighbouring surfaces of the specimen, overall profile of the whole specimen can be measured by using the fringe scanning Fourier transform method. The method to determine step height from its surface profile is ...

Surface roughness is an important feature of engineering surfaces. For surface roughness profile measurement, most of the exiting methods [1-6] would require isolated conditions to reduce the effect of base vibrations. The scattering interference method [7-8], based on a statistical algorithm together with comparison, may be used in a production environment, but the accuracy and reliability are...

We describe a noncontact profile correction technique for quantitative, wide-field optical measurement of tissue absorption (microa) and reduced scattering (micros) coefficients, based on geometric correction of the sample's Lambertian (diffuse) reflectance intensity. Because the projection of structured light onto an object is the basis for both phase-shifting profilometry and modulated imagin...

This paper presents a novel method for surface profile determination using multiple sensors. Our approach is based on morphological processing techniques to fuse the range data from multiple sensor returns in a manner that directly reveals the target surface profile. The method has the intrinsic ability of suppressing spurious readings due to noise, crosstalk, and higher-order reflections, as w...

Scattering of energetic F atoms on a fluorinated Si surface is studied by molecular beam methods. The energy transfer closely follows hard-sphere collision kinematics. Energy and angular distributions of unreacted F atoms suggest significant multiple-bounce scattering in addition to single-bounce scattering and trapping desorption. An empirical model of the atom-surface interaction dynamics is ...

In this appendix, we list the expressions that characterize the response of an elastic-perfectly plastic solid with sinusoidal roughness to indentation by a rigid flat punch. The substrate is an elastic-perfectly plastic solid with Young’s modulus E, Poisson’s ratio ν and yield stress Y σ . The surface roughness has wavelength n λ and amplitude n g . In terms of these parameters, we define a ma...

This paper deals with the application of the spline filter as an areal filter for surface metrology. A profile (2D) filter is often applied in orthogonal directions to yield an areal filter for a three-dimensional (3D) measurement. Unlike the Gaussian filter, the spline filter presents an anisotropic characteristic when used as an areal filter. This disadvantage hampers the wide application of ...

In this study, we investigate the transparency of an overdense inhomogeneous plasma slab. This anomalous transmission is achieved when the conditions provided for the incident electromagnetic wave to excite coupled surface waves on the both sides of the slab. These conditions require that the homogeneous overdense plasma, or the metallic film, is placed between two dielectric layers. Here, the ...

A novel optical edge-projection method is proposed for surface contouring of an object with low reflectivity. A structured light edge is projected onto a dark surface, and the image is captured by a CCD camera. The object contour is evaluated with an active triangular projection algorithm, and one obtains a whole-field three-dimensional contour of the object by scanning the optical edge over th...