This paper describes the development of a polyimide/SU-8 catheter-tip MEMS gauge pressure sensor. Finite element analysis was used to investigate critical parameters, impacting on the device design and sensing characteristics. The sensing element of the device was fabricated by polyimide-based micromachining on a flexible membrane, using embedded thin-film metallic wires as piezoresistive eleme...

This work presents a low-aspect-ratio (LAR) inertial microfluidic design compatible with roll-to-roll (R2R) hot embossing for size-based cell or microparticle separation in a low-cost and disposable format. The device consists of two segments of LAR channels in which inertial lift forces are used to differentiate lateral positions based on size for separation downstream. Separation of 18μm and ...

Preparation and gas barrier characteristics of polysilazane-derived silica thin films formed on PET by simultaneously applying ultraviolet-irradiation and heattreatment have been investigated. Water-vapor-permeability of the thin film formed by UV irradiation at 100°C was 0.03 g/m2・day, indicating the good water-vapor resistance. The values of gas barrier characteristics depended on the substra...

The search for semiconductors that can be solutionprocessed into thin-film form at low temperature, while simultaneously providing quality device characteristics, represents a significant challenge for materials chemists. Continuous thin films with field-effect mobilities of 10 cm V s or greater are particularly desirable for high-speed microelectronic applications. Attainment of this goal shou...

The purpose of this study is to characterize dosimetric properties of thin film photovoltaic sensors as a platform for development of prototype dose verification equipment in radiotherapy. Towards this goal, flexible thin-film sensors of dose with embedded data acquisition electronics and wireless data transmission are prototyped and tested in kV and MV photon beams. Fundamental dosimetric prop...

the effect of evaporation rate on structural, morphological and optical properties of electron beam evaporated cds thin films have been investigated. cds thin film deposited by electron beam evaporation method in 12nm/min and 60nm/min evaporation rates on glass substrates. x-ray diffraction, scanning electron microscopy, uv-vis-nir spectroscopy and atomic force microscopy were used to character...

as we know sol-gel is one of the most important techniques for thin film preparation. in this paper, high transmission silica thin films have been prepared by dip-coating process from a new silicon-alkoxide solution. the prepared sol was stable for 45 days which is very important to characterize the coating process. the optical properties as a function of aging time, withdrawal rate, and heat t...

in this study, tio2 and zno nanofilms were prepared by sol-gel spin-coating method. nanofilms were characterized by x-ray diffraction (xrd), energy dispersive analysis of      x-ray (edx), scanning electron microscopy (sem) and field emission scanning electron microscopy (fe-esm). structural and morphological properties of nanofilms were investigated. the average crystalline size of tio2 and zn...

thin bonded films have many applications in antireflection and reflection coating, insulating and conducting films and semiconductor industries. thermal conductivity is one of the most important parameter for power packaging since the thermal resistance of the interconnections is directly related to the heat removal capability and thermal management of the power package. the defects in material...

Current methodologies used for the inference of thin film stress through curvature measurement are strictly restricted to stress and curvature states that are assumed to remain uniform over the entire film/substrate system. These methodologies have recently been extended to a single layer of thin film deposited on a substrate subjected to the non-uniform misfit strain in the thin film. Such met...