Actuator materials can directly convert different types of energy into mechanical energy. In this work, we designed and fabricated electrothermal air pump-type actuators by utilization of various nanostructured carbon materials, including single wall carbon nanotubes (SWCNTs), reduced graphene oxide (r-GO), and graphene oxide (GO)/SWCNT hybrid films as heating elements to transfer electrical st...

In this brief a new low actuation voltage RF MEMS switch is presented which can be integrated and controlled with available CMOS technologies. Despite the advantages in the design of RF MEMS switches designing a low actuation voltage RF MEMS switch is still a challenging task. To overcome this problem, a small size RF MEMS switch utilizing a moving plate with multiple holes supported by a low s...

In this paper we present a 3D nonlinear dynamic model which describes the transient mechanical analysis of an ohmic contact RF MEMS switch, using finite element analysis in combination with the finite difference method. The model includes real switch geometry, electrostatic actuation, the two-dimensional non-uniform squeeze-film damping effect, the adherence force, and a nonlinear spring to mod...

Microelectromechanical systems (MEMS) have been proposed as DC electrical metrology references. The design reported here is the first to enhance the qualities of a MEMS DC reference with potential tuning and sensing via an isolated and monolithically integrated MEMS technology and, thereby, convert a stable parallel-plate voltage reference to a simple, sensitive, low-burden voltage sensor. This...

A low voltage, two-level-metal, and multi-layer insulator electrowetting-on-dielectric (EWD) platform is presented. Dispensing 300pl droplets from 140nl closed on-chip reservoirs was accomplished with as little as 11.4V solely through EWD forces, and the actuation threshold voltage was 7.2V with a 1Hz voltage switching rate between electrodes. EWD devices were fabricated with a multilayer insul...

A voltage regulator is developed to extend the operation range of a electrostatic actuator using a displacement feedback. The feedback actuator system can be used for continuous position tracking of step, ramp, or harmonic voltage signals. The electrostatic actuator is composed of a micro-cantilever beam electrode above a fixed electrode. The voltage difference between the two electrodes is reg...

Micropumps have promising applications in biomedical devices andmicro total analysis systems. Conjugated polymer actuators provide an important potential mechanism for realizing micropumps because of their amenability to miniaturization and low actuation voltages. In this paper we present a novel, conjugated polymer petal-actuated diaphragm micropump, which is in contrast to the typical diaphra...

Ionic polymer-metal composites (IPMCs) have recently received tremendous interest as soft biomimetic actuators and sensors in various bioengineering and human affinity applications, such as artificial muscles and actuators, aquatic propulsors, robotic end-effectors, and active catheters. Main challenges in developing biomimetic actuators are the attainment of high strain and actuation force at ...

A low actuation voltage RF MEMS shunt capacitive switch has been designed and simulated for use in X-band (8-12GHz) applications. The MEMS switch is a freely moving membrane over coplanar waveguide. Double meander structure of tuned dual beam is used here to improve the isolation of switch. Actuation is achieved by using electrostatic mechanism because of its low power consumption, small size a...

Water, like any polarizable medium, responds to a nonuniform electric field by collecting preferentially in regions of maximum field intensity. This manifestation of dielectrophoresis ~DEP! makes possible a variety of microelectromechanical liquid actuation schemes. In particular, we demonstrate a new class of high-speed DEP actuators, including ‘‘wall-less’’ flow structures, siphons, and nanod...