System Dynamics and Adaptive Control for MEMS Gyroscope Sensor Juntao Fei1,2 and Hongfei Ding2 1Jiangsu Key Laboratory of Power Transmission and Distribution Equipment Technology 2College of Computer and Information, Hohai University, Changzhou, 213022, P. R. China Abstract: This paper presents an adaptive control approach for Micro‐Electro‐Mechanical Systems (MEMS) z‐axis gyroscope sensor....

This paper provides a comprehensive derivation for thermoelastic damping (TED) in flexural-mode ring gyroscopes, in light of recent efforts to design high rateresolution gyroscopes. Imposing an upper limit on the attainable mechanical noise floor of a vibratory gyroscope, thermoelastic damping in a ring gyroscope is extracted from the equations of linear thermoelasticity. By assuming that it is...

In this paper, the stability of a functionally graded magneto-electro-elastic (FG-MEE) micro-beam under actuation of electrostatic pressure is studied. For this purpose Euler-Bernoulli beam theory and constitutive relations for magneto-electro-elastic (MEE) materials have been used. We have supposed that material properties vary exponentially along the thickness direction of the micro-beam. Gov...

In this paper, a digital rebalance loop for MEMS gyroscope is designed and its performance test is performed. First, the system model of MEMS gyroscope is established by dynamic analysis. Then, the digital rebalance loop is designed using modern control technique. The performance of the digital rebalance loop is compared with that of conventional PID rebalance loop. Through frequency response a...

In this paper, the effect of the crack on dynamic behavior of cracked micro-beam in the presence of DC and AC loads are investigated. By applying the residual axial stress and fringing field stress, a nonlinear analytical model of cracked micro-beam is presented and crack is modeled by a massless rotational spring. The governing equation of the system is solved using Galerkin procedure and shoo...

In this paper we present recent work on the design, fabrication by silicon micromachining, and packaging of a new gyroscope for stabilizing the autopilot of rotating aircraft. It operates based on oscillation of the silicon pendulum between two torsion girders for detecting the Coriolis force. The oscillation of the pendulum is initiated by the rolling and deflecting motion of the rotating carr...

the static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. two engineering cases including cantilever and double cantilever micro-beam are considered. considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent euler-bernoulli beam model is used based on a modified couple stress theory, c...

The combination of micro-machined technology with the Atomic Spin Gyroscope(ASG) devices could fabricated Chip Scale Gyroscope(CASG). core gyroscope is a vapor cell which contains alkali metal and isotope enriched noble gases such as 129Xe 131Xe. quadrupolar frequency shift 131Xe key parameters affect drift ASG related to material in they are contained. In micro machined technology, typical uti...

This paper represents a first step in developing an indoor navigation system based only on Micro-Electro-Mechanical Systems (MEMS) accelerometer and gyroscope sensors. The major advantage of the proposed inertial navigation system consists on the fact that it does not require any complex infrastructure to be able to operate. For determining the distance it uses three axis accelerometer sensors,...