Micro piezoelectric vibration generator with high energy density may provide infinite and continuous energy for wireless sensor network. In order to improve generating capacity under given dimension, aiming at external force and displacement incentive environment, mathematics model of piezoelectric cantilever generator generating capacity are established, and influence law of unimorph and bimor...

The quest to 'forward-engineer' and fabricate biological machines remains a grand challenge. Towards this end, we have fabricated locomotive "bio-bots" from hydrogels and cardiomyocytes using a 3D printer. The multi-material bio-bot consisted of a 'biological bimorph' cantilever structure as the actuator to power the bio-bot, and a base structure to define the asymmetric shape for locomotion. T...

Numerical modelling of atomic force microscopy cantilever designs and experiments is presented with the aim of exploring friction mechanisms at the microscale. As a starting point for this work, comparisons between finite element (FE) models and previously reported mathematical models for stiffness calibration of cantilevers (beam and V-shaped) are presented and discrepancies highlighted. A col...

This paper presents a review of MEMS based piezoelectric energy harvesting for low frequency and low power applications. An introduction to MEMS and its components along with the concept of energy harvesting is presented. The paper also presents a device configuration of cantilever based basic components of MEMS energy harvesters, i.e. unimorph, bimorph. Results of different designs for MEMS en...

INTRODUCTION: Micro Electro Mechanical Systems (MEMS) are fabricated with an in-plane fabrication technology. Out-of-plane structures can be designed to be assembled to provide thermal and electrical isolation from the substrate [1 -3]. These isolations can potentially improve the performance of a range of MEMS devices by decreasing any unwanted coupling effects or parasitic losses from the dev...

Microfabricated cantilever beams have been used in microelectromechanical systems for a variety of sensor and actuator applications. Bimorph cantilevers accurately measure temperature change and heat flux with resolutions several orders of magnitude higher than those of conventional sensors such as thermocouples, semiconductor diodes, as well as resistance and infrared thermometers. The use of ...

This paper developed an active scanning probe array. The probe array consists of 16×2 probes thermally actuating and sensing. The 32 probes are integrated with Ti/Pt temperature sensors and bimorph thermal actuators. Each probe is a Si3N4 cantilever equipped with a sharp nano scale pyramid tip at its free end. When one of the probes is actuated, its neighboring probes can provide temperature se...

In this work we have proposed an improvement in the shape of the V-shaped microcantilever by varying the width profile. In this paper we have studied the variation of resonant frequency as a function of changes in profile determined by the length of the microcantilever, keeping constant the active area for binding. It is observed that for the optimized nonlinear profile the angle at the tip is ...