A Introduction Research and manufacturing related to silicon devices, circuits, and systems often relies on the wet-chemical etching of silicon wafers. The dissolution of silicon using liquid solutions is needed for deep etching and micromachining, shaping, and cleaning. Also, wet-chemistries are often used for defect delineation in single crystal silicon materials. In this paper, a review of t...

In this paper, we report on the removal of photoresist, post-etch process residues and particles for various patterned semiconductor wafers using supercritical carbon dioxide (SCCO2)/chemical modifier formulations. Optimization of the chemical formulations was determined using data obtained from statistical analysis and designed experiments. Characterization of the processed samples via scannin...

Chemical cleaning is employed frequently for de-scaling exchangers in combination with other cleaning methods. A customized chemical solution is circulated through the scaled apparatus for certain time following drainage and washing. Many cycles of cleaning may be necessary to reach satisfactory de-scaling level. The composition of the cleaning liquor is very important for efficient de-scaling....

To date, KEK has developed cleaning techniques for superconducting niobium RF cavities. These include: electro-polishing (EP), buffered chemical polishing (BCP) barrel polishing (BP), high pressure rinsing (HPR), megasonic ]lot water rinsing, degassing water, ozonated water cleaning, waste water treatment, and so oil. In this paper, we present findings from electro-poloishing of cavities, which...

A pumped bed-membrane bioreactor (PB-MBR) combining powdered activated carbon (PAC) adsorption with bacterial degradation was studied for the purification of tap water, spiked with 2 mg/l of phenanthrene, to sub-ppm levels. The feedwater was supplemented with nitrogen and phosphorous to reach a COD:N:P ratio of 100:10:1. PAC concentration was maintained at 5 g/l. Polyacrylonitrile (PAN) flat-sh...

A closed-loop recycling process is being investigated (using membrane technology) to remove soils from industrial surface cleaning Operations. This recycling process combines cleaning chemical (aqueous and semi-aqueous formulations), cleaning equipment and closedloop recyding methods tb minimize soil loading in a parts cleaning process. Closed-loop recycling and the need for it is the primary t...

BACKGROUND Manufacturers' recommendations on cleaning of tracheostomy tubes focus on general warning information and non-specific manual cleaning procedures. The aim of this experimental study was to evaluate different reprocessing methods and to determine the mechanical integrity and functionality of tracheostomy tubes following reprocessing. METHODS Sixteen cuffed or un-cuffed tracheostomy ...

Membrane bioreactors (MBRs) are advanced tools for biological wastewater treatment to obtain high-quality treated water using ultrafiltration or microfiltration membranes for solid–liquid separation2). Despite their advantages over the conventional activated sludge method, a major challenge associated with the use of MBRs is membrane fouling, which involves the clogging of membrane pores due to...

BACKGROUND In recent years, cleaning has been identified as an occupational risk because of an increased incidence of reported respiratory effects, such as asthma and asthma-like symptoms among cleaning workers. Due to the lack of systematic occupational hygiene analyses and workplace exposure data, it is not clear which cleaning-related exposures induce or aggravate asthma and other respirator...