نتایج جستجو برای: cvd growth

تعداد نتایج: 833533  

Journal: :Journal of the Ceramic Society of Japan 1991

Journal: :Physica B: Condensed Matter 2012

2012
Anne Henry Stefano Leone Franziska Beyer Henrik Pedersen Olle Kordina Sven Andersson Erik Janzén Franziska C. Beyer Olof Kordina

The growth of thick epitaxial SiC layers needed for high-voltage, high-power devices is investigated with the chloride-based chemical vapor deposition. High growth rates exceeding 100 μm/h can be obtained, however to obtain device quality epilayers adjustments of the process parameters should be carried out appropriately for the chemistry used. Two different chemistry approaches are compared: a...

Journal: :Chemical Engineering Science 1995

Journal: :Le Journal de Physique IV 1995

2009
Shigeo Maruyama

Developments of catalytic CVD generation of single-walled carbon nanotubes (SWNTs) are reviewed with an emphasis on vertically aligned (VA) growth. Following the first realization of VA-SWNTs [1] by alcohol catalytic CVD (ACCVD) method, various techniques are reported for the vertical aligned growth such as control of water [2], point-arc microwave plasma CVD [3], molecular-beam CVD [4], hot-fi...

2016
Sung-Jin Chang Moon Seop Hyun Sung Myung Min-A Kang Jung Ho Yoo Kyoung G. Lee Bong Gill Choi Youngji Cho Gaehang Lee Tae Jung Park

Understanding the underlying mechanisms involved in graphene growth via chemical vapour deposition (CVD) is critical for precise control of the characteristics of graphene. Despite much effort, the actual processes behind graphene synthesis still remain to be elucidated in a large number of aspects. Herein, we report the evolution of graphene properties during in-plane growth of graphene from r...

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