Microlithographic systems rely on precision alignment and a high-level of dimensional stability to achieve required performance. In critical applications, immunity to thermally induced dimensional changes is achieved by the use of low coefficient of thermal expansion (CTE) materials such as ULE® in components such as reflective optics and machine structures. ULE® has an expansion coefficient (α...

PbMg1/3Nb2/3O3 (PMN) powder was prepared by citrate organic solution, and barium titanate (BT) seed particles were added to encourage the perovskite phase formation. Sintering was followed using the constant heating rate mode of a dilatometer, and it was observed that the seed concentration affected the PMN shrinkage rate and crystal structure. The study of the lattice parameters of the samples...

A HfSiO4 ceramic was prepared by a conventional solid state synthesis method by sintering at 1600 °C. The morphology of the sintered surface was characterized using scanning electron microscopy and atomic force microscopy and the average surface roughness was about 118 nm. The sintered HfSiO4 ceramic has εr = 7.0, Qu × f = 25 000 and τf = -44 ppm °C(-1) at 10 GHz. It exhibits promising thermal ...

The formation of intragranular pores, induced by diopside crystallization in diopside–albite glasses, was highlighted in a previous study and here confirmed by SEM observation. The sinter-crystallization kinetics of four glass compositions, labelled G1, G2, G3 and G2-Cr, characterized by the formation of induced crystallisation porosity, PCR, was investigated. The activation energies of crystal...