In this paper, an analytical technique based on the global residue harmonic balance method (GRHBM) is applied in order to obtain higher-order approximate solutions of electrostatically actuated micro-beam. To illustrate applicability and accuracy method, a high level was established for by comparing results with numerical solution as well already published literature, such variational approach ...

In the current study, the effects of Casimir force and squeeze film damping on pull-in instability and dynamic behavior of electrostatically actuated nano and micro electromechanical systems are investigated separately. Linear elastic membrane theory is used to model the static and dynamic behavior of the system for strip, annular and disk geometries. Squeeze film damping is modeled using nonli...

Micro-electromechanical system (MEMS) devices are small compared to normal mechanical devices, but they are still large compared to the wavelength of visible light. Thus, simple low-cost optical measurement techniques can be adapted for precise characterization of the motions of these small objects. The results of such measurements are important for veriication of simulations, especially for de...

We present a mathematical model for the dynamics of an electrostatically actuated micro-cantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular, illustrate that parametric r...

This paper investigates the parametric excitation of a micro-pipe conveying fluid suspended between two symmetric electrodes. Electrostatically actuated micro-pipes may become unstable when the exciting voltage is greater than the pull-in value. It is demonstrated that the parametric excitation of a micro-pipe by periodic (ac) voltages may have a stabilizing effect and permit an increase of the...

Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with a...

The homotopy analysis method HAM is employed to propose an approach for solving the nonlinear dynamical system of an electrostatically actuated micro-cantilever in MEMS. There are two relative merits of the presented HAM compared with some usual procedures of the HAM. First, a new auxiliary linear operator is constructed. This operator makes it unnecessary to eliminate any secular terms. Furthe...

We present a mathematical model for the dynamics of an electrostatically actuated microcantilever. For the common case of cantilevers excited by a periodic voltage, we show that the underlying linearized dynamics are those of a periodic system described by a Mathieu equation. We present experimental results that confirm the validity of the model, and in particular, illustrate that parametric re...

The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices in which electric as well as mechanical and fluid phenomena appear and interact. Because of their microscopic scale, strong coupling effects arise between the different physical fields, and some forces, which were negli...

A resonance based micro pressure sensor is designed and simulated an analytical overview of its working presented. The resonator used electrostatically actuated clamped-clamped (cc) beam supported over docks. correlation between stress in micro-resonator width docs the support structure evaluated. It compared to a without it found that with provides better sensitivity. Performance device evalua...