A novel technique to measure in situ, simultaneously, temperature and thin film thickness during semiconductor processing is described in this paper. The measurement technique is based on the principle propagating in a silicon wafer is a function of both the that the velocity of an ultrasonic Lamb wave wafer temperature and the thin film coating on the wafer surface. We are able to btain the pr...

Adhesion and friction tests were carried out in order to investigate the effect of temperature on the tribological characteristics of poly(methylmethacrylate) (PMMA) film using AFM. The pull-off and friction forces on the PMMA film were measured under a high vacuum condition (below 1 × 10(-4) Pa) as the temperature of the PMMA film was increased from 300 to 420 K (heating) and decreased to 300 ...

Current methodologies used for the inference of thin film stress through curvature measurements are strictly restricted to uniform film stress and system curvature states over the entire system of a single thin film on a substrate. By considering a circular multilayer thin film/substrate system subjected to nonuniform temperature distributions, we derive relations between the stresses in each f...

The effectiveness of multiwalled carbon nanotubes (MWCNTs) as strain sensors is investigated. The key contribution of this paper is the study of real-time strain response at the macroscale of MWCNT film under tensile load. In addition, real-time voltage change as a function of temperature is examined. MWCNT films attached to a brass specimen by epoxy using vacuum bonding have been studied. The ...

This paper deals with the design and fabrication of a quartz-crystal resonator used in a thickness-monitor unit, measuring film thickness in a film-depositing system. A purpose-grown quartz crystal is cut to form the desired wafer. Two gold electrodes are deposited on both surfaces of the wafer to provide electrical contacts. The resonance frequency of the resonator, at room temperature, and th...

We study the time evolution of a thin liquid film coating the outer surface of a sphere in the presence of gravity, surface tension and thermal gradients. We derive the fourth-order nonlinear partial differential equation that models the thin film dynamics, including Marangoni terms arising from the dependence of surface tension on temperature. We consider two different imposed temperature dist...

A bismuth telluride (BT)/indium selenide (IS) multilayer film was deposited at room temperature by rf magnetron sputtering on a sapphire substrate in order to investigate how the multilayered structure affects the microstructure and thermoelectric properties. The effect of annealing at different temperatures was also studied. The results were compared with those from a BT film with the same thi...

In film cooling experimental studies, due to the difficulty in measuring the surface heat flux variation, a Heat Flux Ratio (HFR) equation originally derived by Mick and Mayle [1], has been widely employed to calculate the surface heat flux distribution using the measured adiabatic film effectiveness and surface temperature. A close examination of the derivation process and applications of the ...

It is found in many film-cooling experiments and computational analyses that a heated surface is employed to simulate the actual film-cooling condition with a cooling jet and a hot main flow. Considering that the dominant energy passage in turbine airfoil film cooling is always from the hot combustion gas flowing into the airfoil, employing a heated surface to simulate the actual film cooling c...

In this study, the effect of temperature on the build-up of exponentially growing polyelectrolyte multilayer films was investigated. It aims at understanding the multilayer growth mechanism as crucially important for the fabrication of tailor-made multilayer films. Model poly(L-lysine)/hyaluronic acid (PLL/HA) multilayers were assembled in the temperature range of 25-85 °C by layer-by-layer dep...