New metrology for characterizing chemically amplified resist is needed in order to meet the stringent demands of the DUV lithographic technologies. In this paper, we present a general model for DUV resist optical constants. In this model, we assume that the photoresist is homogeneous and can be decomposed into several “components” according to their distinct and signatures over a broad range of...

We present the first demonstration, to our knowledge, of a label-free flow cytometer for the analysis of biological specimens using multiplex coherent anti-Stokes Raman scattering (MCARS) and elastic scatter measurements. The MCARS system probes the Raman vibrational energy levels and the elastic scatter provides morphological information. We demonstrate these capabilities by probing a culture ...

The development of different forms of measurement models for impedance has allowed examination of key assumptions on which the use of such models to assess error structure are based. The stochastic error structures obtained using the transfer-function and Voigt measurement models were identical, even when non-stationary phenomena caused some of the data to be inconsistent with the Kramers–Kroni...

A derivation of the fluctuation-dissipation theorem for the microcanonical ensemble is presented using linear response theory. The theorem is stated as a relation between the frequency spectra of the symmetric correlation and response functions. When the system is not in the thermodynamic limit, this result can be viewed as an extension of the fluctuation-dissipation relations to a situation wh...

Unstable atomic nuclei release excess energy through various radioactive decay processes. In some cases, including internal conversion and electron capture, the atom remains ionised after the nuclear decay event. Atomic relaxation back to the ground state occurs rapidly via radiative and non-radiative processes, often referred to collectively as atomic radiations. Non-radiative processes includ...

Lβ2 X-ray satellite spectra of tungsten and gold are calculated using the Multi-Configuration Dirac-Fock energies and compared with recent experimental data. New calculations of L1-L3M5 Coster-Kronig transition energies for tungsten are presented, confirming the origin of the Lβ2 visible satellites reported by two experimental groups. We found the value 5.09 eV for the average energy of the L1-...

We report the observation of laser gain in the vacuum ultraviolet pumped by super Coster-Kronig decay. Using a 5-J, 300-psec pump pulse of 1064-nm radiation, we have observed gain on transitions in Zn III at 127.0, 130.6, and 131.9 nm with total gains of exp(2.4), exp(5.1), and exp(3.2), respectively. The large branching ratios of the rapid super Coster-Kronig decay into a small number of final...

The Kronig-Penney model is typically used to compute the band structure and bound states of a periodic crystal. While the model allows analytical solutions, it does so by simplifying the potential to a periodic square potential. We present a method of using transfer matrices to compute energy bands in a 1-Dimensional lattice. This method does not involve the simplification required by the Kroni...