in the current study the effect of casimir force and squeezed film damping on the pull-in instability and dynamic behavior of electrostatically actuated nano and micro electromechanical systems is investigated separately. linear elastic membrane theory is used to model the static and dynamic behavior of system for strip, annular and disk geometries. squeezed film damping effect is modeled using...

The fields of micro- and nanomechanics are strongly interconnected with the development micro-electro-mechanical (MEMS) nano-electro-mechanical (NEMS) devices, their fabrication applications. This article highlights biomimetic concept designing new nanodevices for advanced materials sensing

Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of microand, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurem...

We study the response of a large array of coupled nonlinear oscillators to parametric excitation, motivated by the growing interest in the nonlinear dynamics of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). Using a multiscale analysis, we derive an amplitude equation that captures the slow dynamics of the coupled oscillators just above the onset of parametric oscilla...

This paper reports a new protocol on-chip for functionalization purpose enabled by liquid dielectrophoresis (LDEP) technique at the microscale, and its adaptation to the nanoscale for the MEMS/NEMS applications. In a previous study, circular spots (diameter: 25-100 μm), made of polymer, have been accurately positioned onto a surface using LDEP. In this study, doped polysilicon LDEP structures h...

The Casimir-Lifshitz force originates from the quantum vacuum fluctuations of electromagnetic field. This is especially intense between interacting objects at nanoscale distances, and it can be attractive or repulsive depending on optical properties materials (amongst other parameters). fundamental phenomenon heart malfunctioning nano- micro-electromechanical devices (NEMS MEMS) that integrate ...

Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication solution to the battery miniaturization problem, active DNA arrays and a wide variety of chemical and biological sensors. We established that it is possible to use C-MEMS to create very high aspect ratio carbon structures (e.g. posts with an aspect ratio...

Nanolithography techniques providing a good scalability and feature size controllability are of great importance for the fabrication integrated circuits (IC), MEMS/NEMS, optical devices, nanophotonics, etc. Herein, cost-effective, easy...

We propose a novel multifunctional reconfigurable antenna (MRA) design using micro/nanoelectromechanical system (M/NEMS) switches. This single MRA operates over five frequency bands of GSM900, GPS1575, GSM1800, PCS1900 and UMTS2100. The reconfigurability in operating frequency is achieved by the activation of M/NEMS switches which are integrated with the antenna architecture. Summary of Researc...

Because of exceptional mechanical, chemical, and tribological properties, diamond has a great potential to be used as a material for the development of high-performance MEMS and NEMS such as resonators and switches compatible with harsh environments, which involve mechanical motion and intermittent contact. Integration of such MEMS/NEMS devices with complementary metal oxide semiconductor (CMOS...