Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in st...

We are proposing a liquid rate gyro named “ECF micro rate gyro”. Although the sensing principle is based on that of a conventional gas rate sensor, the liquid micro rate gyro works by an electro-conjugate fluid (ECF) instead of a gas. The electro-conjugate fluid is a dielectric fluid that works as a functional fluid, generating a powerful jet flow (ECF jet) when subjected to a high DC voltage. ...

-One of the latest manifestations of miniaturization in space applications is the development of standardized nanosatellite. Recent achievements and future trends of Micro-Electro-Mechanical Systems (MEMS) technology have indicated that microtechnology is the critical technologies of future space programs. Enabling technologies for demanding applications will surely make use of MEMS based compo...

Microelectromechanical Systems (MEMS) is the technology of the very small, and merges at the nano-scale into "Nanoelectromechanical" Systems (NEMS) and Nanotechnology. MEMS are also referred to as micro machines, or Micro Systems Technology (MST). MEMS are separate and distinct from the hypothetical vision of Molecular nanotechnology or Molecular Electronics. MEMS generally range in size from a...

The paper introduces a new methodology with a distributed triangle transducer for the strongly coupled simulation of micro electro mechanical systems (MEMS) in ANSYS Finite Element (FE) program.

This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. M...

Micro-Electro-Mechanical Systems, or MEMS, are integrated micro devices or systems combining electrical and mechanical components. They are fabricated using integrated circuit (IC) batch processing techniques and can range in size from micrometers to millimeters. These systems can sense, control and actuate on the micro scale, and function individually or in arrays to generate effects on the ma...

As micro-device application in consumer and commercial products develops, efficient tools are required to simulate device dynamics and assess structural performance. An integrated methodology is developed for studying the dynamics of thin film bifurcating structures. Results are presented for a generic thin film structure, which exhibit classical electro-mechanical hysteresis. Such structures c...

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-electro-mechanical systems) fabrication technologies and enabled micro devices of various sensors and actuators. The technologies are classified based on the sequence of the fabrication of CMOS circuitry and MEMS elements, while SOI (silicon-on-insulator) CMOS MEMS are introduced separately. Introduction of associated...