نتایج جستجو برای: micro fabrication

تعداد نتایج: 165501  

2015
Rita S. Rodrigues Ribeiro Raquel Queirós Olivier Soppera Ariel Guerreiro Pedro A. S. Jorge

In this work the use of guided wave photo-polymerization for the fabrication of novel polymeric micro tips for optical trapping is demonstrated. It is shown that the selective excitation of linear polarized modes, during the fabrication process, has a direct impact on the shape of the resulting micro structures. Tips are fabricated with modes LP02 and LP21 and their shapes and output intensity ...

2009
A. T. Al-Halhouli S. Büttgenbach M. Michalzik

This work reports on diverse technologies implemented for fabricating microfluidic devices such as biomedical micro sensors, micro pumps, bioreactors and micro separators. UV depth lithography and soft lithography were applied in the fabrication processes using different materials, for example SU-8, polydimethylsiloxane (PDMS), silicon, glass and ceramics. Descriptions of the fabrication proces...

Amir Samak Nima Izadi Shamsoddin Mohajerzadeh

In this paper, we report vertical etching of poly-ethylene-terephtalate plastic substrates by means of a chemical solvent and in the presence of ultra-violet illumination. Since the PET substrate is not dissolved in solvent without a UV source, only the desired areas with proper opening for UV exposure are removed in a vertical fashion. The etch rate varies between 1 and 8 micrometer per minute...

2002
Arum Han Olivia Wang Swomitra K. Mohanty Mason Graff Bruno Frazier

A multi-layer plastic packaging technology has been developed for microfluidic systems containing electrical and mechanical functionality. Hot embossing and heat staking of plastics, micro stenciling of electrodes, and stereolithography (SLA) was combined with conventional MEMS fabrication techniques to realize the system. The approach allows for multiple materials of fabrication, provides a so...

2016
Adhitya Bhaswara Hohyun Keum Fabrice Mathieu Bernard Legrand Seok Kim Liviu Nicu Thierry Leïchlé

Citation: Bhaswara A, Keum H, Mathieu F, Legrand B, Kim S, Nicu L and Leïchlé T (2016) A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes. Front. Mech. Eng. 2:1. doi: 10.3389/fmech.2016.00001 a simple Fabrication Process Based on Micro-masonry for the realization of nanoplate resonators with integrated ...

2013
S. Madhava Reddy Anudeep Kumar

MEMS is the acronym for Micro Electro Mechanical Systems. Micromachining has potential applications for large area image sensors and displays, but conventional MEMS technology, based on crystalline silicon wafers cannot be used. Instead, large area devices use deposited films on glass substrates. This presents many challenges for MEMS, both as regards materials for micro-machined structures and...

2009
Fabian Kloosterman Thomas J. Davidson Stephen N. Gomperts Stuart P. Layton Gregory Hale David P. Nguyen Matthew A. Wilson

Chronic recording of large populations of neurons is a valuable technique for studying the function of neuronal circuits in awake behaving rats. Lightweight recording devices carrying a high density array of tetrodes allow for the simultaneous monitoring of the activity of tens to hundreds of individual neurons. Here we describe a protocol for the fabrication of a micro-drive array with twenty ...

2017
Guanbao Yang Wei He Jianguo Zhu Lei Chen Maria Farsari

This paper experimentally investigated the fabrication and optimization of micro-scale gratings formed by nanosecond laser etching. The mechanism of nanosecond laser processing and the geometric phase analysis (GPA) are discussed, and the factors influencing the fabrication process including laser energy, laser fluence, and ablation threshold of material, are experimentally studied. In order to...

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