In this paper we present the first investigation of a batch method for folding of threedimensional micrometer-sized silicon nitride structures by capillary forces. Silicon nitride tubes have been designed and fabricated using DRIE at the center of the planar origami patterns of the structures. Water is brought to the structures by pumping the liquid through the wafer via those tubes. Isolated m...

in this paper we modified a simple two-dimensional photonic crystal waveguide by creating micro cavity resonators in order to increase the output light emission which can be applicable to photonic integrated circuits. The micro cavity resonators are constructed by removing two tubes close to the waveguide output. Coupling emitted light from waveguide with those micro cavities, results increasin...

A uniformly distributed array of micro test tubes and microbeakers is formed on a p-type silicon substrate with tunable cross-section and distance of separation by anodic etching of the silicon wafer in N, N-dimethylformamide and hydrofluoric acid, which essentially leads to the formation of macroporous silicon templates. A reasonable control over the dimensions of the structures could be achie...

In present work, comparison of three different tube bundles for particular heat exchanger is proposed. Three types are smooth, micro finned and corrugated tubes. Heat exchanger will be designed with smooth tube bundle and simulated. Micro fin and corrugation over tube is applied separately for same heat exchanger in feasible size and simulated for performance. Besides, comparison is done with h...

Inorganic precipitation reactions are known to self-organize a variety of macroscopic structures, including hollow tubes. We discuss recent advances in this field with an emphasis on experiments similar to 'silica gardens'. These reactions involve metal salts and sodium silicate solution. Reactions triggered from reagent-loaded microbeads can produce tubes with inner radii of down to 3 μm. Dist...

An active micro-endoscope based on concentric tubes, an emerging class of continuum robots, is presented hereby. It is designed to reach the digestive tube and the stomach for early cancer detection and intervention. The manipulator is constructed from three flexible, telescopic, and actuated tubes. The actuators are based on Electro-Active Polymer electrodes coated and patterned around the tub...

Fabrication techniques have been developed to produce a perforated polymer microtube as a drug delivery device. The technique consists of first forming a silicon platform with trenches and alignment marks to hold the tubes for subsequent processing. Photolithography and reactive ion etching with an inductively coupled plasma source were used to fabricate micro holes on the surface of polyimide ...

In this paper, cyclic flaring and sinking (CFS) as a new severe plastic deformation (SPD) method was employed to produce the ultrafine grain (UFG) copper tubes. The extra friction has eliminated in the CFS method that provided the possibility for production of longer UFG tubes compared to the other SPD methods. This process was done periodically to apply more strain and consequently finer grain...