This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures. Process flows include wet bulk etching and wafer bonding, surface micromachining, deep trench silicon micromachining, CMOS MEMS, and micromolding.

one of the bio-sensing mechanisms is mechanical. rather than measuring shift in resonance frequency, we adopt to measure the change in spring constant due to adsorption, as one of the fundamental sensing mechanism. this study explains  determination of spring constant of a surface functionalized micro machined micro cantilever, which resonates in a trapezoidal cavity-on silicon wafer, with the ...

Developing laser processes for industrial applications is a challenging and laborious task. Conventional controllers scan systems lack the ability to predict actual path of beam on workpiece, making extensive trial-and-error testing different parameters delay settings necessary in order achieve satisfactory results. Finding balance between accuracy achieved throughput typically compromise, vari...

Due to its outstanding chemical stability and mechanical properties, silicon carbide (SiC) is one of the best materials for harsh environment applications. In this work, bulk micromachining technique was utilized to fabricate a PECVD SiC pressure sensor. This technique simplified the process and solved the stickiness problem in surface micromachining. The whole fabrication temperature is under ...

UV laser micromachining of metallic materials has been used in microelectronic and other industries. Knowledge and data about the process vary with feature size, material, laser wavelength and pulse duration. This paper reports on experimental and numerical investigation of micromachining of copper using a frequency tripled Nd:YAG laser with 50 ns pulse duration. An axisymmetric model is develo...