Fast effects of a slow excitation on the main resonance of a nonlinear micromechanical resonator are analytically and experimentally investigated. We show, in particular, how the bifurcation topology of an undesirable unstable behavior is modified when the resonator is simultaneously actuated at its primary and superharmonic resonances. A stabilization mechanism is proposed and demonstrated by ...

An evaluation of the potential for MEMS technologies to realize the RF front-end frequency gating spectrum analyzer function needed by true software-defined cognitive radios is presented. Here, the relevant MEMS technologies include vibrating micromechanical resonators that exhibit record on-chip Q‘s at GHz frequencies; medium-scale integrated micromechanical circuits that implement on/off swit...

Surface mounting technology is a key process in MEMS packaging. The finite element model of package structures was established in this paper according to the designed micromechanical silicon resonant accelerometer. The effects of package substrate materials, adhesive material characteristics, uneven adhesive thickness, and adhesive defects on the micromechanical silicon resonant accelerometer w...

Having now produced devices with sufficient Q, thermal stability, aging stability, and manufacturability, vibrating RF MEMS technology is already finding its way into next generation timing and wireless applications. At this juncture, the technology is now poised to take its next logical steps: higher levels of circuit complexity and integration. In particular, as vibrating RF MEMS devices are ...

Polysilicon wine-glass mode micromechanical disk resonators using a stemless, non-intrusive suspension structure have been demonstrated in both vacuum and atmospheric pressure at frequencies around 73.4 MHz with Q’s as high as 98,000 in vacuum, and 8,600 in atmosphere—the highest ever reported Q’s at this frequency range and in these environments for any on-chip micro-scale resonator. The Q of ...

Cavity optomechanics has served as a platform for studying the interaction between light and micromechanical motion via radiation pressure. Here we observe such phenomena with a graphene mechanical resonator coupled to an electromagnetic mode. We measure thermal motion and backaction cooling in a bilayer graphene resonator coupled to a microwave on-chip cavity. We detect the lowest flexural mod...