Microscale Laser Shock Processing (LSP) is a technique that may be potentially used to manipulate the residual stress distributions in metal film structures and thus improve the reliability performances of micro-devices. In this study, microscale LSP of copper thin films on single crystal silicon substrates is investigated. Curvature measurements verify that substantial average compressive resi...

Knowledge of location and magnitude of charge density, together with the pore morphology allows one to calculate the Donnan potential, characterizing ion exclusion in charged porous materials. Use of the electro-chemical potential together with Gauss’ electrostatic theorem allows the computation of the ion and voltage distribution at the microscale. On the other hand, commonly used macroscopic ...

Using the immersion lensing technique, the resolution of a conventional spherical lens can be improved by a factor of 1/n over its value in air (n, the refractive index of the immersion medium). Depending on the relative position between an object and a lens, either a real or a virtual image is formed. Here we report a new physical phenomenon experimentally observed in the microscale lens imagi...

The ability to characterize the microscale mechanical properties of biological materials has the potential for great utility in the field of tissue engineering. The development and morphogenesis of mammalian tissues are known to be guided in part by mechanical stimuli received from the local environment, and tissues frequently develop to match the physical characteristics (i.e., elasticity) of ...

This paper presents a study of different force control schemes for controlling contact during manipulation tasks at the microscale. Explicit force control and impedance control are compared in a contact transition scenario consisting of a compliant microforce sensor mounted on a microrobotic positioner, and a compliant microstructure fabricated using Silicon MEMS. A traditional double mass-spri...

A review is presentedof the mechanics of microscale adhesion in microelectromechanical systems (MEMS). Some governingdimensionlessnumbers such as Tabor number, adhesionparameter and peel number for microscale elastic adhesion contact are discussed in detail. The peel number is modiŽ ed for the elastic contact between a rough surface in contact with a smooth plane. Roughness ratio is introduced ...