We have developed a process for the three-dimensional (3D) machining of p-type silicon on a microand nano-scale using high-energy ion beam irradiation with one or more energies and fluences, followed by electrochemical anodization in hydrofluoric acid. We present a study of the dependence of our fabricated structures on irradiating ion energies, fluences, geometries and wafer resistivity. All t...

Nano electromechanical systems (NEMS) represent an important new class of device with wide ranging applications. In this paper we report proposals and calculations for novel methods for excitation and readout of cantilever-style NEMS resonators which are applicable over a wide temperature range. We suggest a Lorentz force-based excitation method and discuss an ultrasensitive readout provided by...

Optical slot waveguides fabricated on the silicon-on-insulator (SOI) platform enables direct light–matter interaction [1]. Its ring resonators are promising for trace-gas sensing [2], microparticle trapping [3], and nano-optomechanical mass and displacement measurements [4]. To date, slot ring/racetrack structures on buried oxide (BOX) have been adopted in the above applications. However, their...

We present the fabrication of parylene-based hollow nanomechanical resonators, following a simple two step fabrication process with a thermal budget of less than 120°C. This process is ideal for fast prototyping and compatible with most materials used in microand nano-fabrication. In particular, the example we present here shows a hybrid structure with silicon nitride and parylene, but we have ...

Abstract The adequate modeling of the micro/nano arc resonators' dynamics is vital for their successful implementation. Here, a size-dependent model, wherein material structure, porosity, and micro-rotation effects grains are considered, derived by combining couple stress theory, multi-phase classical Euler–Bernoulli beam aiming to characterize frequency tunability resonators as monitoring eith...

Micro and nano electromechanical resonators have been widely used as single or multiple-mass detection sensors. Smaller devices with higher resonance frequencies and lower masses offer higher mass responsivities but suffer from lower frequency stability. Synchronization phenomena in multiple MEMS resonators have become an important issue because they allow frequency stability improvement, there...

Whispering gallery mode resonators (WGMRs) take advantage of strong light confinement and long photon lifetime for applications in sensing, optomechanics, microlasers and quantum optics. However, their rotational symmetry and low radiation loss impede energy exchange between WGMs and the surrounding. As a result, free-space coupling of light into and from WGMRs is very challenging. In previous ...