This paper presents a simple second-order controller that damps the resonance typical of piezoelectric nanopositioners and delivers good tracking performance. This method employs the Integral Resonant Control scheme (IRC) for damping the dominant resonant mode of the piezoelectric nanopositioner and uses an integral controller to achieve tracking performance. As disturbance rejection is a main ...

Measurement tasks of modern microand nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which...

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This paper reports the design, fabrication, and performance of piezoelectric bidirectional conveyors based on microelectromechanical systems (MEMS) featuring 3D-printed legs in bridge resonators. The structures consisted aluminum-nitride (AlN) film top millimeter-sized rectangular thin silicon bridges two electrode patches. position size patches were analytically optimized for travelling or sta...

In this paper, we present the design, fabrication, and testing of a moving magnet actuator (MMA) for large range (∼10mm) nanopositioning. MMAs are direct-drive, single-phase electromagnetic linear actuators that provide frictionless and backlashfree motion. These qualities, along with an adequate motion range, make MMAs promising candidates for large range nanopositioning. In this work, we iden...

This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.