An actuator is a device that converts input energy into mechanical energy. According to various types of input energy, various actuators have been advanced. Displacement in the electromagnetic, hydraulic and pneumatic actuators achieve by moving a piston via electromagnetic force or pressure, however the piezoelectric actuator (piezoceramic plates) displace directly. Therefore, accuracy and spe...

Hysteresis is an important nonlinear effect exhibited by piezoelectric actuators and its control has been drawing considerable attention. This paper presents the development of an inversion based model predictive control to compensate for piezoelectric actuator hysteresis. Experiments were carried out to verify the effectiveness of the developed control method. The result obtained shows that th...

Piezoelectric stick-slip actuators have become the foundation of modern micromanipulation. Due to difficulty in closed-loop control with manipulators that use piezoelectric stick-slip actuators, methods for open-loop control with a human in the loop have been developed. The utility of such methods depends directly on the accuracy of the open-loop models of the manipulator. Prior research has sh...

Hysteresis of a piezoelectric actuator is ratedependent. Most hysteresis models are based on elementary rate-independent operators and are not suitable for modeling actuator behavior across a wide frequency band. This work proposes a rate-dependent modified PrandtlIshlinskii (PI) operator to account for the hysteresis of a piezoelectric actuator at varying frequency. We have shown experimentall...

To lower the operating voltage and improve the output performance of piezoelectric actuators, a multilayer monolithic ultrasonic linear piezoelectric actuator was analyzed with the method of finite element analysis (FEA), and a prototype was fabricated and experimentally researched in this study. Experimental results show that the actuator with a multilayer piezoelectric lead zirconate titanate...

Piezoelectric actuator is treated as RC load when it is modeled electrically. For some piezoelectric actuator applications, arbitrary voltage is required to actuate. Especially for unidirectional arbitrary voltage driving like as sine wave, some special inverter with circuit that can charge and discharge the capacitive energy can be used. In this case, the difference between power supply level ...

This paper presents the fabrication and the testing of piezoelectric unimorph actuators with embedded piezoelectric sensors which are meant to be used for the actuation of the Micromechanical Flying Insect (MFI). First the fabrication process of a piezoelectric bending actuator comprising a standard unimorph and a rigid extension is described together with the advantages of adding such an exten...

Piezoelectric bimorph actuation has been successfully used in numerous types of microdevices, most notably micropumps. However, even for the simple case of circular geometry, analytical treatments are severely limited. This study utilized the finite-element method to optimize the deflection of a circular bimorph consisting of a single piezoelectric actuator, bonding material and elastic plate o...

We consider initial and boundary value problems modelling the vibrations of a plate with piezoelectric actuator. The simplest model leads to the Bernoulli-Euler plate equation with right hand side given by a distribution concentrated in an interior curve multiplied by a real valued time function representing the voltage applied to the actuator. We prove that, generically with respect to the cur...

The piezoelectric stick-slip (PZT-SS) actuator is known to achieve motion with a theoretically unlimited range yet high resolution (several nanometers). In this type of actuator, friction plays an active role in producing a meaningful stick-slip motion. However, friction is a source of heat which may cause significant temperature rise, affecting the dynamic performance of the actuator. Our stud...