Mercury is a very toxic element that is widely spread in the atmosphere, lithosphere, and surface water. Concentrated mercury poses serious problems to human health, as bioaccumulation of mercury within the brain and kidneys ultimately leads to neurological diseases. To control mercury pollution and reduce mercury damage to human health, sensitive determination of mercury is important. This art...

In microcantilever-based biosensor, a sensitive layer plays an important role as a place for the establishment of functional layer for detecting molecules target. When a sensitive layer is coated on the microcantilever surface, a surface stress change is induced as a consequence of adsorbate-surface interaction, resulting in a deflection of the microcantilever. However, the microcantilever with...

Measurement of femtoscale displacements in the ultrasonic frequency range is attractive for advanced material characterization and sensing, yet major challenges remain in their reliable transduction using non-optical modalities, which can dramatically reduce the size and complexity of the transducer assembly. Here we demonstrate femtoscale displacement transduction using an AlGaN/GaN heterojunc...

We evaluate two novel reciprocal self-sensing methods for tapping-mode atomic force microscopy (TM-AFM) utilizing charge measurement and charge actuation, respectively. A microcantilever, which can be batch fabricated through a standard microelectromechanical system (MEMS) process, is coated with a single piezoelectric layer and simultaneously used for actuation and deflection sensing. The setu...

This work proposes a novel self-sensing tapping-mode atomic force microscopy operation utilizing charge measurement. A microcantilever coated with a single piezoelectric layer is simultaneously used for actuation and deflection sensing. The cantilever can be batch fabricated with existing micro electro mechanical system processes. The setup enables the omission of the optical beam deflection te...

Microcantilever is a device of MEMS (microelectro-mechanical system) which can be used as bio-chemical sensor, such to determine the characteristics chemical liquids. In this work, an investigation evaporation rate liquids, i.e., ethanol, methanol, and propanol, was carried out using resonant frequency change vibrated microcantilever. We two types microcantilever, namely uncoated-microcantileve...

microcantilevers (mcls) are cost-effective and highly sensitive devices for biodetection. adsorption of specific analytes on the microcantilever surface causes the bending of mcl through changing of the surface characteristics. these new bioprobes designed in a way that one side of the microcantilever surface is coated with a selective receptor that absorbs particular molecules. after surface a...

We demonstrate a microcantilever array with an in-plane photonic transduction method for simultaneous readout of each microcantilever. The array is fabricated on a silicon-on-insulator substrate. Rib waveguides in conjunction with a compact waveguide splitter network comprised of trench-based splitters and trench-based bends route light from a single optical input to each microcantilever on the...