Electrostatically actuated microbeams have been studied by many researchers in the last few years. The aim of this study is to present an improved numerical analysis of the dynamic instability of a cantilever microbeam immersed in an incompressible viscous fluid. The finite element method is used for solving the vibrational equation of the microbeam and the potential functions of the fluids in ...

The effect of a sacrificial layer residue on a cantilever beam in the nano-electro-mechanical nonvolatile memory is investigated for the optimization of reliability characteristics. Different from previous research, pull in voltage model of nano-electro-mechanical nonvolatile memory used triangular residue layer which is considered by real wet etching process. Modified pull in voltage model was...

This paper addresses the static and dynamic stabilities of a parametrically excited torsional micro-actuator. The system is composed of a rectangular micro-mirror symmetrically suspended between two electrodes and acted upon by a steady (dc ) while simultaneously superimposed to an (ac ) voltage. First, the stability of the system subjected to a quasi-statically applied (dc ) voltage is investi...

In this article, the pull-in instability and dynamic characteristics of electrostatically actuated suspended microchannel resonators are studied. A theoretical model is presented to describe the pull-in effect of suspended microchannel resonators by considering the electrostatic field and the internal fluid. The results indicate that the system is subjected to both the pull-in instability and t...

The reproducibility of the pull-in voltage of a single side clamped free-standing beam has been investigated for application as a DC voltage reference. A 2 mm long beam has been fabricated in an epipoly process with, at the tip, poly-poly electrodes extending into the axial direction for electrostatic lateral deflection and a combdrive operating in the normal lateral beam direction. The DC volt...

In this paper, the effect of the crack on dynamic behavior of cracked micro-beam in the presence of DC and AC loads are investigated. By applying the residual axial stress and fringing field stress, a nonlinear analytical model of cracked micro-beam is presented and crack is modeled by a massless rotational spring. The governing equation of the system is solved using Galerkin procedure and shoo...

The static pull-in instability of beam-type microelectromechanical systems (MEMS) is theoretically investigated. Two engineering cases including cantilever and double cantilever microbeam are considered. Considering the midplane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theor...

The reproducibility over temperature and time of the pull-in voltage of micromechanical structures has been analyzed and verified using fabricated devices in silicon. The pull-in structures are intended for use as an on-chip voltage reference. Microbeams of 100m length, 3m width, and 11m thickness are electrostatically actuated with a very reproducible pull-in voltage at 9.1 V. Devices demonstr...

The pull-in voltage of a parallel plate electrostatic transducer is used to determine the amount of over-etching in fabricated devices. A detailed analysis of the capacitor behaviour over the full displacement range yields a model, which is used to describe the relation between over-etching and measured pull-in voltage. SEM photos confirm the over-etching measurement based on pull-in voltage. T...