This paper reports on the state-of-the-art of technologies for the design and fabrication of MEMS micro-mirrors. We discuss the major design issues, considerations, calculations and restrictions of micro mirrors. The materials employed for the reflective surfaces are described along with their properties. The materials used for the static and dynamic MEMS micro structures as well as the differe...

Because of its kinetic nature and computational advantages, the Lattice Boltzmann method (LBM) has been well accepted as a useful tool to simulate micro-scale flows. The slip boundary model plays a crucial role in the accuracy of solutions for micro-channel flow simulations. The most used slip boundary condition is the Maxwell slip model. The results of Maxwell slip model are affected by the ac...

This paper shows firm level micro analysis of information network use and its impact on firm’s productivity. New evidences on economic impacts of IT by type of its application are provided, based on METI’s firm level data of Japanese manufacturers and distributors. It is found that productivity impact of information network use is different, depending on application of network. In addition, due...

This paper presents the development of a standard classification and coding system for micro-scale assembled devices that can link micro-assembly concepts and technologies to the attributes of the assembly components and their interrelationships that define the assembled device/product. The proposed system is based on an n-digit coding of both individual parts as well as the assembly. The codin...

In order to achieve the high-precision and high-efficiency machining of micro-channels for hard brittle materials, authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic (TBEPAMUSM). This transfers micro-channel shape punch-pin workpiece material through form micro-channel. At same time, it uses electrophoretic properties ultra-fine ab...

−This paper reports the design, modeling, fabrication and measurement of passive microvalves, which are applicable to glaucoma implants. The proposed microvalves were designed using fluidic theory. The microvalves consisted of microchannels and chambers. The microchannels had a constant fluidic resistance generating a pressure difference. Six kinds of microvalves were designed using fluidic equ...

A tissue-engineering scaffold resembling the structure of the natural extracellular matrix can often facilitate tissue regeneration. Nerve and tendon are oriented micro-scale tissue bundles. In this study, a method combining injection molding and thermally induced phase separation techniques is developed to create single- and multiple-channeled nanofibrous poly(L-lactic acid) scaffolds. The ove...

Experimental studies of blood microflows in rectangular biocompatible polymer microchannels measured using micro-particle image velocimetry are reported. The data processing methods, data collection methods, and choice of channel material are demonstrated to impact the velocity profile measurements obtained. Results show that the use of red blood cells as tracer particles creates a large depth ...

  Micro scale gas flows has attracted significant research interest in the last two decades. In this research, the fluid flow of gases in the stepped micro-channel at a wide range of Knudsen number has been analyzed with using the Lattice Boltzmann (MRT) method. In the model, a modified second-order slip boundary condition and a Bosanquet-type effective viscosity are used to consider the veloci...