We report simple and effective methods to develop long-term, stable silicon nanowire-based pH sensors and systematic studies of the performance of the developed sensors. In this work, we fabricate silicon nanowire pH sensors based on top-down fabrication processes such as E-beam lithography and conventional photolithography. In order to improve the stability of the sensor performance, the senso...

Micro hotlm shear-stress sensors have been developed by using surface micromachining techniques. The sensor consists of a suspended silicon-nitride diaphragm located on top of a vacuum-sealed cavity. A heating and heat-sensing element, made of poly-crystalline silicon material, resides on top of the diaphragm. The underlying vacuum cavity greatly reduces conductive heat loss to the substrate an...

A silicon micromachined waveguide on-chip sensor for J-band (220-325 GHz) is presented. The sensor is based on a micromachined cavity resonator provided with an aperture in the top side of a hollow waveguide for sensing purposes. The waveguide is realized by microfabrication in a silicon wafer, gold metallized and assembled by thermocompression bonding. The sensor is used for measuring the comp...

The work is devoted to the creation of a sensor structure based on porous silicon membrane. under study integrates layer used as gas transport and sensitive non-stoichiometric tin oxide. paper investigates morphology shows permeability membrane silicon. sensitivity test obtained by passing gas-air mixture containing NO 2 has been studied. Keywords: silicon, membrane, oxide, thin films, resistiv...

     This study introduces a wearable in-shoe system for real-time monitoring and measurement of the plantar pressure distribution of the foot using eleven sensing elements. The sensing elements utilized in ShrewdShoe have been designed in an innovative way, they are based on a barometric pressure sensor covered with a silicon coating. The presented sensing element has great linearity up to 300...

PURPOSE Previous studies of optical interference from the whole thickness of the precorneal tear film showed much lower contrast than from the pre-contact lens tear film. It is hypothesized that the recorded low contrast is related to roughness of the corneal surface compared with the smooth contact lens surface. This hypothesis is tested, and characteristics of this roughness are studied. ME...

An in-plane constant-efficiency variable-diffraction-angle grating and an in-plane high-angular-selectivity grating are combined to enable a new compact silicon diffractive sensor. This sensor is fabricated in silicon-on-insulator and uses telecommunications wavelengths. A single sensor element has a micron-scale device size and uses intensity-based (as opposed to spectral-based) detection for ...