نتایج جستجو برای: sputter deposition

تعداد نتایج: 97899  

2003
T.-M. Lu Y.-P. Zhao J. T. Drotar T. Karabacak

Random surface roughness very often can occur during the growth or etching of films under non-equilibrium conditions. Several competing mechanisms such as noise, surface diffusion, and shadowing all play a role in the evolution of surface roughness. However, recent results obtained in many growth and etching processes exhibit an unusual tendency: the morphology is very rough where it is expecte...

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