Nanoelectronic devices form the building blocks of the nanoscaled systems and require innovative technologies for their realization. Single Electron Transistors (SET) is a novel class of nano transistor which operates on the principle of Coulomb blockade. Coulomb blockade effects become dominant when the device dimensions approach few nano-meters. The SET devices are potential candidates for ap...

An integrated humidity sensor system with nano-structured carbon nitride film as humidity sensing material is fabricated by a 0.8 μm analog mixed CMOS process. The integrated sensor system consists of differential humidity sensitive field effect transistors (HUSFET), temperature sensor, and operational amplifier. The process contains two poly, two metal and twin well technology. To form CNx fil...

The paper describes the performance analysis, structural design and fabrication of piezoresistive pressure sensor using simulation technique. A polysilicon double nano-wire piezoresistor was fabricated by means of RIE (reactive ion etching). The polysilicon double nanowire pressure sensor has 100x100nm cross section area and has a thickness about 10nm. Finite element method (FEM) is adopted to ...

We present a novel and efficient thermal sensor design methodology. The growing demand for power management on VLSI systems drives the need for accurate thermal sensors. Conventional design techniques for on-chip thermal sensors in nanometer technologies consume expensive design iterations and result in increased power consumption and area overhead. Power-efficient, high-sensitivity thermal sen...

Micro and nano electro mechanical systems (MEMS and NEMS) have emerged as a technology that integrates micro/nano mechanical structures with microelectronics, mainly for sensing and actuation applications. MEMS and NEMS sensor systems that can operate in the presence of high temperatures, corrosive media and/or high radiation will reduce weight, improve machine reliability and reduce cost in st...

In this study, a multi nanosensor was fabricated for the simultaneous detection of carbon dioxide, methane, ethanol, and ammonia gases, and its electrochemical response to various concentrations of these gases were investigated. In order to fabricate this multi nanosensor, in the first phase, the Graphene-Oxide/Polyaniline (GO/PANI) nanocomposite was synthesized. Chemical ...

Surface plasmon resonance sensor is used to measure the variation of dielectric constant sample, but its sensitivity is limited to surrounding temperature fluctuation. We present a high sensitivity phase-based surface plasmon resonance sensor made by gold nano-cylinder array. This structure is not only to reduce thermal conduction by the non-continuous gold array, but also to enhance surface pl...

We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films. The water molecule absorption efficiency was optimized by forming loosely-packed PET nanostructures. Then, the humidity sensing characteristics were analyzed in terms of sensitivity, linearity, reversibility, sta...

Sensors that change color have the advantages of versatility, ease of use, high sensitivity, and low cost. The recent development of optically based chemical sensing platforms has increasingly employed substrates manufactured with advanced processing or fabrication techniques to provide precise control over shape and morphology of the sensor micro- and nano-structure. New sensors have resulted ...