A novel method has been developed to fabricate submicron beams with galvanic etch stop for Si in TMAH. The different Au:Si area ratios before and after the release of the beams are used to trigger the galvanic etch stop to fabricate submicron single crystal Si beams in standard Si wafers. Before the beams are released from the substrate, the Au electrodes are connected to the substrate electric...

Local gallium implantation of silicon by a focused ion beam (FIB) has been used to create a mask for anisotropic tetramethylammonium hydroxide (TMAH) wet etching. The dependence of the etch stop properties of gallium-doped silicon on the implanted dose has been investigated and a dose of 4 x 10(13) ions cm(- 2) has been determined to be the threshold value for achieving observable etching resis...

This paper reports the development of optical lever based parylene cantilevers for biochemical sensing. A simple but effective process to fabricate parylene cantilevers using Tetramethylammonium Hydroxide (TMAH) bulkmicromachining was demonstrated. A scheme of using anchoring holes was employed to prevent the peeling off of parylene during TMAH etching. Moreover, ridge structures were incorpora...

The morphological change of silicon macropore arrays formed by metal-assisted chemical etching using shape-controlled Au thin film arrays was investigated during anisotropic chemical etching in tetramethylammonium hydroxide (TMAH) aqueous solution. After the deposition of Au as the etching catalyst on (111) silicon through a honeycomb mask prepared by sphere lithography, the specimens were etch...

It has been demonstrated that both conventional flash pyrolysis and thermally assistcd hydrolysis and alkylation (THA) in the presence of tetramethylammonium hydroxide (TMAH), enable the detection of sorne important components of wood extractives (WE) from Eucalyptus globulus. These are released by thermoevaporation from the acetone extracts and easily identified by GC-MS. On the other hand, Py...

A simple, rapid and reliable method was developed for the determination of total mercury in biological samples. Samples were solubilized using tetramethylammonium hydroxide (TMAH). The organically bound mercury was cleaved and converted to inorganic mercury by on-line addition of KMnO4. The decomposed mercury together with inorganic mercury originally present in samples was determined by flow i...

Foram avaliados dois métodos diferentes de preparo de amostras de carnes baseados na solubilização em meios alcalino ou ácido. O objetivo deste estudo foi determinar os teores de Na e K após solubilização com hidróxido de tetrametilamônio (TMAH) à temperatura ambiente, e com ácido fórmico e aquecimento em bloco de digestão a 50 oC por cerca de 2 h. A solubilização alcalina se apresentou como um...

Pyrolysis-gas chromatography-mass spectrometry (Py-GC-MS) in the presence of tetramethylammonium hydroxide (TMAH) was applied to kenaf (Hibiscus cannabinus) fibers in order to clarify the chemical composition of in situ lignin. The core and bast samples obtained from the middle position of variety Chinpi-3 were pyrolyzed at 500 °C for 4 s with TMAH. The core pyrogram revealed peaks retaining th...

Abstract Wet anisotropic etching is extensively employed in silicon bulk micromachining to fabricate microstructures for various applications the field of microelectromechanical systems (MEMS). In addition, it most widely used surface texturing minimize reflectance light improve efficiency crystalline solar cells. wet micromachining, etch rate a major factor that affects throughput. Slower incr...