This paper provides a survey of some of the available MEMS Inertial Measurement Units (IMUs) and some of the applications that MEMS are fulfilling. Inertial MEMS have been under development for over 20 years and numerous suppliers world-wide now exist. The performance of these IMUs spans the range from consumer/automotive grade (low performance) to tactical grade (~1 deg/hour, ~1 milli g). Tact...