A simple and accurate experimental method is described for determining the effective cantilever spring constant and the detector sensitivity of atomic force microscopy cantilevers on which a colloidal particle is attached. By attaching large (approximately 85 microm diameter) latex particles at various positions along the V-shaped cantilevers, we demonstrate how the normal and lateral spring co...

Energy harvesting system is using ambient energy conversion in the environment. The environmental will be converted into usable electrical that can used controlling wireless electronic devices. available mechanical vibration from sound then to by a piezoelectric transducer. size of represents surface area electrode on model. A smaller transducer unable produce good due area. bigger dimension mo...

This paper uses finite element method to obtain the optimal performance of piezoresistive microcantilever sensor by optimizing the geometrical dimension of both cantilever and piezoresistor. A 250 μm x 100 μm x 1 μm SiO2 cantilever integrated with 0.2 μm thick Si piezoresistor was used in this study. The sensor performance was measured on the basis of displacement sensitivity and surface stress...

MEMS are used in acceleration, flow, pressure and force sensing applications on the micro macro levels. The fundamental part of every sensor is transducer which converts measurend intrest into interpretable output signal. most prominent piezoresistive cantilever translates any signal an electrical signal.This paper presents deisgn fabrication U shaped with enhanced sensitivity stiffness gives b...

On an AgNO3 crystal, an equilateral or a right-angle triangle-shaped Ag trimer was selectively fabricated through near-field photo-reduction and observed in situ by using an apertured cantilever coupled with an atomic force microscope. By using the different triangle-shaped Ag trimers, irradiation wavelength and polarization dependence of surface-enhanced Raman scattering were investigated.

Valve piezoelectric pumps usually have larger flow rate than that of valveless ones. However, the traditional cantilever valve easily induces stress concentration which impacts the reliability of pumps. Therefore, a cymbal‐shaped slotted check valve is proposed to be applied in a piezoelectric pump in order to reduce the stress concentration of the valve and thus improve the reliability of the ...

The present study investigates the effects of thermal conduction and convection on self-heating temperatures and bimetallic deflections produced in doped microcantilever sensors. These cantilevers are commonly used as sensors and actuators in microsystems. The cantilever is a monolith, multi-layer structure with a thin U-shaped element inside. The cantilever substrate is made of silicon and sil...

We present in-depth discussion of the design and optimization of a nanomechanical sensor using a silicon cantilever comprising a two-dimensional photonic crystal (PC) nanocavity resonator arranged in a U-shaped silicon PC waveguide. For example, the minimum detectable strain, vertical deflection at the cantilever end, and force load are observed as 0.0133%, 0.37 mum, and 0.0625 muN, respectivel...