A stable, device specific, multiple energy domain and multi scale simulation tool for Radio Frequency (RF) MicroElectroMechanicalSystems (MEMS) devices is developed. A structured design methodology is adopted for design and optimization of RF MEMS shunt switch and MEMS inductor. The Computer Aided Design (CAD) tool incorporates physical parameters such as surface roughness. An electromechanical...

This article summarizes the most recent technological developments in the realization of integrated aluminum nitride (AlN) piezoelectric microelectromechanical system (MEMS) for radio frequency (rf) front ends to be employed in next generation wireless communication devices. The AlN-based resonator and switch technologies are presented, their principle of operation explained, and some key exper...

In this brief a new low actuation voltage RF MEMS switch is presented which can be integrated and controlled with available CMOS technologies. Despite the advantages in the design of RF MEMS switches designing a low actuation voltage RF MEMS switch is still a challenging task. To overcome this problem, a small size RF MEMS switch utilizing a moving plate with multiple holes supported by a low s...

Corresponding Author: Noor Hidayah Mohd Yunus and Jahariah Sampe Institute of Microengineering and Nanoelectronics,Universiti Kebangsaan Malaysia, 43600 Bangi, Selangor, Malaysia Email: [email protected] [email protected] Abstract: The paper deals with the growing interest of energy harvesting systems due to great development in many new emerging technologies in electronics and teleco...

This paper presents a chip-level integration of radio-frequency (RF) microelectromechanical systems (MEMS) air-suspended circular spiral on-chip inductors onto MOSIS RF circuit chips of LNA and VCO using a multi-layer UV-LIGA technique including SU-8 UV lithography and copper electroplating. A high frequency simulation package, HFSS, was used to determine the layout of MEMS on-chip inductors wi...

This paper presents the design and realization of a low power, high speed circuit used to actuate RF MEMS (Radio Frequency MicroElectroMechanical Systems) based phase shifters at 60GHz.The phase shifter are used to realize beam forming reconfigurable antenna for high data rate WPAN (Wireless Personal Area Network) applications. RF MEMS commonly have high actuation voltages usually obtained with...

In the current communications market, there exists a great demand for devices, which function as passive signal processing units. High performance and small size are identified to be the bottlenecks to meet market demand in communications area[1,3]. MEMS or micromachining technology can yield small, low weight and high performance components to replace the currently used off-chip components. Th...

Introduction: Microwave filters are critical components for electronic warfare, radar, and communications systems, but typical tunable filters are bulky, expensive, and consume large amounts of power. Radio frequency microelectromechanical systems (RF MEMS) technology provides the possibility of low-loss, high linearity filtering in volumes comparable to those of integrated circuits [1]. The ma...

Micromechanical (or “μmechanical) communication circuits fabricated via IC-compatible MEMS technologies and capable of low-loss filtering, mixing, switching, and frequency generation, are described with the intent to miniaturize wireless transceivers. Possible MEMS-based receiver front-end architectures are then presented that use these micromechanical circuits in large quantities to enhance ro...

Recent advances in the Micro Electro-Mechanical System (MEMS) technology have made wireless MEMS accelerometers an attractive tool for Structural Health Monitoring (SHM) of civil engineering structures. To date, sensors' low sensitivity and accuracy--especially at very low frequencies--have imposed serious limitations for their application in monitoring large-sized structures. Conventionally, t...