This paper describes the structural and thermal modeling of a Micro Electro Mechanical System (MEMS) z-axis angular gyroscope. The gyroscope consists of a oscillating proof mass supported by a suspension made up of six concentric interconnected rings rigidly attached to an anchored frame. The device is capable of measuring angular displacement through precession of the proof mass line of oscill...

The paper deals with the mechanical behavior of a micro-beam bonded with two piezoelectric layers. The micro-beam is suspended over a fixed substrate and undergoes the both piezoelectric and electrostatic actuation. The piezoelectric layers are poled through the thickness and equipped with surface electrodes. The equation governing the micro-beam deflection under electrostatic pressure is deriv...

We describe two possible structures for a localization system which should exploit ultrasonic sensor measures as well as inertial and odometric data to maintain a correct estimate of the location of a mobile robot. The objective is to reduce the position and orientation error in the presence of slippage, and, at the same time, to identify the bias of the gyroscope. The two algorithms have the c...

Driving mode of MEMS (Micro-Electro-Mechanical Systems) Vibratory Gyroscope is discussed in the paper. We analyze the closed-loop circuit of MEMS gyroscope from two aspects of amplitude fixed and frequency locking. In the amplitude fixed circuit, Automatic Gain Control (AGC) circuit is employed to update the amplitude of the driving force, together with a PI controller to improve the accuracy a...

MEMS (Micro-electro-mechanical Systems) refer to devices or systems integrated with electrical and mechanical components in the scale of microns. Due to its small size, low cost, low power consumption and high efficiency, MEMS technology has been widely used in many fields. In this paper, a novel comb-driven, differential capacitance sensing MEMS vibratory gyroscope based on glass-silicon-glass...

MEMS (Micro Electro Mechanical System) gyroscopes have been widely applied to various fields, but MEMS gyroscope random drift has nonlinear and non-stationary characteristics. It has attracted much attention to model and compensate the random drift because it can improve the precision of inertial devices. This paper has proposed to use wavelet filtering to reduce noise in the original data of M...

The static pull-in instability of beam-type micro-electromechanical systems is theoretically investigated. Two engineering cases including cantilever and double cantilever micro-beam are considered. Considering the mid-plane stretching as the source of the nonlinearity in the beam behavior, a nonlinear size-dependent Euler-Bernoulli beam model is used based on a modified couple stress theory, c...

A new digitized decoupled dual-axis micro dynamically tuned gyroscope with three equilibrium rings (TMDTG) is proposed which can eliminate the constant torque disturbance (CTD) caused by the double rotation frequency of a driving shaft with a micro dynamically tuned gyroscope with one equilibrium ring (MDTG). A mechanical and kinematic model of the TMDTG is theoretically analyzed and the struct...

We present an adaptive algorithm for a system integrated with micro-electro-mechanical systems (MEMS) gyroscopes and a compass to eliminate the influence from the environment, compensate the temperature drift precisely, and improve the accuracy of the MEMS gyroscope. We use a simplified drift model and changing but appropriate model parameters to implement this algorithm. The model of MEMS gyro...

Parametric excitation in vibratory systems is known well over hundred years. Recently it also being exploited Micro-electromechanical Systems (MEMS). One example of these are micro-ring gyroscopes, which used the automotive, navigation and space industries. The sensitivity such gyroscopes can be impaired by signal noise induced through parasitic capacitance between drive sense electrodes. Apply...