The pull-in instability places substantial restrictions on the performance of electrostatically driven MEMS devices by limiting their range of travel. Our objective is to present a systematic method of carrying out optimal design of novel types of electrostatic beams that have enhanced travel ranges. In this paper, we implement a shape optimization methodology using simulated annealing to maxim...

Power supply is a bottle-neck problem of wireless micro-sensors, especially where the replacement of batteries is impossible or inconvenient. Now piezoelectric material is being used to harvest vibration energy for self-powered sensors. However, the geometry of a piezoelectric cantilever beam will greatly affect its vibration energy harvesting ability. This paper deduces a remarkably precise an...

Vibration energy harvesting with piezoelectric materials currently generate up to 300 microwatts per cm2, using it to be mooted as an appropriate method of energy harvesting for powering low-power electronics. One of the important problems in bimorph piezoelectric energy harvesting is the generation of the highest power with the lowest weight. In this paper the effect of the shape and geometry ...

This paper investigates damping ratio in micro-beam resonators based on magneto-thermo-elasticity. A unique aspect of the present study is the effect of permanent magnetic field on the stiffness and thermo-elastic damping of the micro resonators. In our modeling the theory of thermo-elasticity with interacting of an externally applied permanent magnetic field is taken into account. Combined the...

Selective Ga + ion implantation and miring by focused ion beam exposure and subsequent wet chemical etching is used to fabricate micro/nanomechanical elements in Si. Freestanding elements with a ~ 30 nm membrane thickness are made by controlled selective underetching between unexposed and exposed areas. Ultrahigh-frequency cantilever beams have been made with resonances in the tens of MHz range...

In this paper the problems of state estimation, tracking control and shape control in a micro-cantilever beam with nonlinear electrostatic actuation are investigated. The system’s partial differential equation of motion is converted into a set of ordinary differential equations by projection method. Observabillity of the system is proven and a state estimation system is designed using extended ...

in this paper, chaotic motion analysis and its control for a non-planar non-linear cantilever beam with axial and lateral parametric excitation in the free end is accomplished. this is a new method for control of chaotic motion of a non-linear planar beam. in this survey, internal resonance of the beam is 2:1 and the initial resonance is in the outside of plane and it is assumed a sub-resonance...

In this paper, we have addressed the Design and simulation results of an electrostatically controlled micro mirror using COMSOL multiphysics Software. The structural mechanical properties of the actuation mechanism of a square shape micro-mirror with the lift-off of the structure used four springs simulating a prestressed cantilever beam. There are few base materials were introduced like Alumin...

This report describes the development of a low cost, digital Micro Electro Mechanical System (MEMS) vibration meter that reports an approximation to the RMS acceleration of the vibration to which the vibration meter is subjected. The major mechanical element of this vibration meter is a cantilever beam, which is on the order of 500 µm in length, with a piezoresistor deposited at its base. Vibra...

Understanding the impact of microstructure on thermo-mechanical behavior oxide nuclear fuels is vital to predicting their performance through multiscale models. Evaluating mechanical properties at sub-grain length scale key developing these In this work, 3D finite element (FE) models were constructed simulate micrometer-scale bending micro-cantilever beams fabricated using porous polycrystallin...