This paper reports on mass sensing with 33 nm thick single-crystalline cantilevers by a double-beam laser Doppler vibrometer. The resonant frequency of an oscillating thin cantilever beam is very sensitive to a loaded mass. However, the drift of the resonance, due to gas adsorption and mechanical instability, limits the minimum detectable mass in general. Two cantilevers for sensing and its ref...

In an optical lever set-up one or two modulated laser beams of 0,1 to 6 mW modulation amplitude at a wavelength of 670 nm were focused at uncoated and gold-coated microfabricated cantilevers. The motion of the levers was analyzed by an optical lever set-up. The mechanical resonance (30 to 60 kHz) of the cantilevers was excited by the modulated light both in air and under vacuum conditions (10 6...

We show that cantilever array sensors can sense the formation of supported phospholipid bilayers on their surface and that they can monitor changes in mechanical properties of lipid bilayers. Supported lipid bilayers were formed on top of microfabricated cantilevers by vesicle fusion. The formation of bilayers led to a bending of the cantilevers of 70-590 nm comparable to a surface stress of 27...

Under the Optonanogen project (EU contract IST-2001-37239), a novel biosensor has been developed, which incorporates a disposable acrylic polymethylmethacrylate (PMMA) fluidic header. This header is designed to deliver a sample to a series of chemically primed cantilevers where hybridization of target DNA sequences and resulting deflection of the cantilevers is detected optically. Two different...

We propose in this paper the characterization of a new generation of piezoelectric cantilevers called thick-films piezoelectric actuators. Based on the bonding and thinning process of a bulk PZT layer onto a silicon layer, these cantilevers can provide better static and dynamic performances compared to traditional piezocantilevers, additionally to the small dimensions.

THE STOCHASTIC DYNAMICS OF AN ARRAY OF MICRON SCALE CANTILEVERS IN VISCOUS FLUID BY MATTHEW T. CLARK The stochastic dynamics of an array of closely spaced micron scale cantilevers in a viscous fluid is considered. The stochastic cantilever dynamics are due to the constant buffeting of fluid particles by Brownian motion and the dynamics of adjacent cantilevers are correlated due to long range ef...

the most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy by the effect of coupling between electric fields and mechanical variables. using piezoelectric cantilevers is the most common method for vibration energy harvesting. changing the shape of the cantilevers can lead to changing the generated output v...

   During past decade the AFM based nanomanipulation has been focus of attention as the promising nano fabrication approach. The main challenge in this process is the real-time monitoring. Consequently, the dynamic models have been proposed as a solution to the existing challenge. In the modeling approach the magnitudes of the forces are proportional to the stiffness coefficients o...

The most promising method for micro scale energy scavenging is via vibration energy harvesting which converts mechanical energy to electrical energy. Using piezoelectric cantilevers is the most common method for vibration energy harvesting. Changing the shape of the cantilevers can lead to changing the generated output voltage and power. In this work vibration energy harvesting via piezoelectri...