In this paper we present a framework for the design of experiments for sensor calibration. The theoretical ideas, which are based on the mathematical theory of optimal design of experiments, are demonstrated using a new software program, I-OPT, which was developed by Crary, Snow, and Hoo.' This program has been used to find I-optimal designs for both a silicon capacitive absolute-pressure senso...

Background. As interest on wearable computing [1] increases, researchers are looking for new materials to use as a support for electronics. A fabric substrate is very appealing: it is elastic and extensible [2], supported by a well known technology and produced at low-cost. State of the art. Some smart pressure-sensors interfacing with a flexible substrate have been developed, but they are eith...

INTRODUCTION The sense of touch plays an important role in everyday life. It provides the body with early contact to surrounding objects. By touching an object, we can tell if it is sharp or smooth; by holding it, we can estimate its weight. Skin is the most extended sensor of the entire human body. The haptic interface gives the first feedback to object manipulation; without sensing the pressu...

A pressure sensor demonstrator has been designed and mounted using a simple analog-digital BiCMOS converter and a capacitive Silicon–Pyrex sensing cell. The measurements as a function of pressure and temperature have enabled to evaluate the efficiency of a ratiometric scheme to self-compensate thermal drifts and nonlinearities. The best demonstrator is characterized by a thermal coefficient of ...

In this paper two MEMS capacitive pressure sensor of two diffident geometries are designed for measurement of absolute pressure. Both of these sensors are designed as parallel plates where one is movable and the other is fixed. The only difference with common parallel plate structure is that one of the movable plates is supported by four anchors with respect to the fixed plate. Here we have con...

In the present work, a new monolithic capacitive pressure sensor is being introduced. The sensor is manufactured according to a custom, 15-step SOI process. The process primarily offers great flexibility as far as sensor design is concerned. Absolute or differential pressure sensing is possible by simply arranging proper sensor package. Measurement sensitivity and span are easily regulated over...

A tire pressure measuring system based on surface acoustic wave (SAW) sensors is presented. Since SAW sensors are powered by the energy of the RF field no battery is required, which is a major drawback of conventional systems. A successful combination of a SAW reflective delay line with a capacitive pressure sensor is shown. With a new way of matching the sensor impedance to the SAW reflector i...